JPH0450732B2 - - Google Patents

Info

Publication number
JPH0450732B2
JPH0450732B2 JP55035834A JP3583480A JPH0450732B2 JP H0450732 B2 JPH0450732 B2 JP H0450732B2 JP 55035834 A JP55035834 A JP 55035834A JP 3583480 A JP3583480 A JP 3583480A JP H0450732 B2 JPH0450732 B2 JP H0450732B2
Authority
JP
Japan
Prior art keywords
electron beam
electron
bias
intensity distribution
bias voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55035834A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56133825A (en
Inventor
Tadahiro Takigawa
Yoshihide Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3583480A priority Critical patent/JPS56133825A/ja
Publication of JPS56133825A publication Critical patent/JPS56133825A/ja
Publication of JPH0450732B2 publication Critical patent/JPH0450732B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP3583480A 1980-03-21 1980-03-21 Electron beam device Granted JPS56133825A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3583480A JPS56133825A (en) 1980-03-21 1980-03-21 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3583480A JPS56133825A (en) 1980-03-21 1980-03-21 Electron beam device

Publications (2)

Publication Number Publication Date
JPS56133825A JPS56133825A (en) 1981-10-20
JPH0450732B2 true JPH0450732B2 (enrdf_load_stackoverflow) 1992-08-17

Family

ID=12452989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3583480A Granted JPS56133825A (en) 1980-03-21 1980-03-21 Electron beam device

Country Status (1)

Country Link
JP (1) JPS56133825A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4889105B2 (ja) * 2006-08-23 2012-03-07 エスアイアイ・ナノテクノロジー株式会社 荷電粒子ビーム装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140982A (en) * 1974-10-02 1976-04-06 Nippon Electron Optics Lab Denshipuroobusochi niokeru biimuanteikasochi
JPS5489579A (en) * 1977-12-27 1979-07-16 Toshiba Corp Electron ray exposure system
JPS54100263A (en) * 1978-01-24 1979-08-07 Jeol Ltd Electron beam exposure device
JPS556829A (en) * 1978-06-29 1980-01-18 Fujitsu Ltd Electron beam exposure method

Also Published As

Publication number Publication date
JPS56133825A (en) 1981-10-20

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