JPH0449815Y2 - - Google Patents
Info
- Publication number
- JPH0449815Y2 JPH0449815Y2 JP12538086U JP12538086U JPH0449815Y2 JP H0449815 Y2 JPH0449815 Y2 JP H0449815Y2 JP 12538086 U JP12538086 U JP 12538086U JP 12538086 U JP12538086 U JP 12538086U JP H0449815 Y2 JPH0449815 Y2 JP H0449815Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion
- wafer holder
- ion implantation
- wafer
- implanted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 50
- 238000005468 ion implantation Methods 0.000 claims description 34
- 238000010884 ion-beam technique Methods 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 87
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 22
- 150000002500 ions Chemical class 0.000 description 16
- 238000000034 method Methods 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 1
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12538086U JPH0449815Y2 (enrdf_load_stackoverflow) | 1986-08-15 | 1986-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12538086U JPH0449815Y2 (enrdf_load_stackoverflow) | 1986-08-15 | 1986-08-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6332446U JPS6332446U (enrdf_load_stackoverflow) | 1988-03-02 |
| JPH0449815Y2 true JPH0449815Y2 (enrdf_load_stackoverflow) | 1992-11-24 |
Family
ID=31018233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12538086U Expired JPH0449815Y2 (enrdf_load_stackoverflow) | 1986-08-15 | 1986-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449815Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-08-15 JP JP12538086U patent/JPH0449815Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6332446U (enrdf_load_stackoverflow) | 1988-03-02 |
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