JPS6332446U - - Google Patents

Info

Publication number
JPS6332446U
JPS6332446U JP12538086U JP12538086U JPS6332446U JP S6332446 U JPS6332446 U JP S6332446U JP 12538086 U JP12538086 U JP 12538086U JP 12538086 U JP12538086 U JP 12538086U JP S6332446 U JPS6332446 U JP S6332446U
Authority
JP
Japan
Prior art keywords
jig
ion
semiconductor wafer
implanted
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12538086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449815Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12538086U priority Critical patent/JPH0449815Y2/ja
Publication of JPS6332446U publication Critical patent/JPS6332446U/ja
Application granted granted Critical
Publication of JPH0449815Y2 publication Critical patent/JPH0449815Y2/ja
Expired legal-status Critical Current

Links

JP12538086U 1986-08-15 1986-08-15 Expired JPH0449815Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12538086U JPH0449815Y2 (enrdf_load_stackoverflow) 1986-08-15 1986-08-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12538086U JPH0449815Y2 (enrdf_load_stackoverflow) 1986-08-15 1986-08-15

Publications (2)

Publication Number Publication Date
JPS6332446U true JPS6332446U (enrdf_load_stackoverflow) 1988-03-02
JPH0449815Y2 JPH0449815Y2 (enrdf_load_stackoverflow) 1992-11-24

Family

ID=31018233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12538086U Expired JPH0449815Y2 (enrdf_load_stackoverflow) 1986-08-15 1986-08-15

Country Status (1)

Country Link
JP (1) JPH0449815Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0449815Y2 (enrdf_load_stackoverflow) 1992-11-24

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