JPH044974Y2 - - Google Patents

Info

Publication number
JPH044974Y2
JPH044974Y2 JP1984096504U JP9650484U JPH044974Y2 JP H044974 Y2 JPH044974 Y2 JP H044974Y2 JP 1984096504 U JP1984096504 U JP 1984096504U JP 9650484 U JP9650484 U JP 9650484U JP H044974 Y2 JPH044974 Y2 JP H044974Y2
Authority
JP
Japan
Prior art keywords
grating
scale
diffraction
light source
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984096504U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112016U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9650484U priority Critical patent/JPS6112016U/ja
Publication of JPS6112016U publication Critical patent/JPS6112016U/ja
Application granted granted Critical
Publication of JPH044974Y2 publication Critical patent/JPH044974Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP9650484U 1984-06-27 1984-06-27 格子干渉型変位検出装置 Granted JPS6112016U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9650484U JPS6112016U (ja) 1984-06-27 1984-06-27 格子干渉型変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9650484U JPS6112016U (ja) 1984-06-27 1984-06-27 格子干渉型変位検出装置

Publications (2)

Publication Number Publication Date
JPS6112016U JPS6112016U (ja) 1986-01-24
JPH044974Y2 true JPH044974Y2 (enEXAMPLES) 1992-02-13

Family

ID=30655996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9650484U Granted JPS6112016U (ja) 1984-06-27 1984-06-27 格子干渉型変位検出装置

Country Status (1)

Country Link
JP (1) JPS6112016U (enEXAMPLES)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0443165Y2 (enEXAMPLES) * 1988-12-03 1992-10-13
SG11201809393PA (en) * 2016-05-03 2018-11-29 Arges Gmbh Optical rotation angle measuring system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2451668A1 (de) * 1974-10-31 1976-05-06 Leitz Ernst Gmbh Anordnung zur geometrischen trennung von lichtfluessen in abbildungssystemen

Also Published As

Publication number Publication date
JPS6112016U (ja) 1986-01-24

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