JPH0449174Y2 - - Google Patents

Info

Publication number
JPH0449174Y2
JPH0449174Y2 JP1988003770U JP377088U JPH0449174Y2 JP H0449174 Y2 JPH0449174 Y2 JP H0449174Y2 JP 1988003770 U JP1988003770 U JP 1988003770U JP 377088 U JP377088 U JP 377088U JP H0449174 Y2 JPH0449174 Y2 JP H0449174Y2
Authority
JP
Japan
Prior art keywords
electrode
plasma
discharge
power supply
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1988003770U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01110832U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988003770U priority Critical patent/JPH0449174Y2/ja
Publication of JPH01110832U publication Critical patent/JPH01110832U/ja
Application granted granted Critical
Publication of JPH0449174Y2 publication Critical patent/JPH0449174Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP1988003770U 1988-01-14 1988-01-14 Expired JPH0449174Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988003770U JPH0449174Y2 (enrdf_load_stackoverflow) 1988-01-14 1988-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988003770U JPH0449174Y2 (enrdf_load_stackoverflow) 1988-01-14 1988-01-14

Publications (2)

Publication Number Publication Date
JPH01110832U JPH01110832U (enrdf_load_stackoverflow) 1989-07-26
JPH0449174Y2 true JPH0449174Y2 (enrdf_load_stackoverflow) 1992-11-19

Family

ID=31205703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988003770U Expired JPH0449174Y2 (enrdf_load_stackoverflow) 1988-01-14 1988-01-14

Country Status (1)

Country Link
JP (1) JPH0449174Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4179263B2 (ja) 2004-10-08 2008-11-12 トヨタ自動車株式会社 過給機付内燃機関

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55151328A (en) * 1979-05-16 1980-11-25 Hitachi Ltd Method and apparatus for fabricating hydrogen-containing amorphous semiconductor film

Also Published As

Publication number Publication date
JPH01110832U (enrdf_load_stackoverflow) 1989-07-26

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