JPH0448925Y2 - - Google Patents

Info

Publication number
JPH0448925Y2
JPH0448925Y2 JP1986083974U JP8397486U JPH0448925Y2 JP H0448925 Y2 JPH0448925 Y2 JP H0448925Y2 JP 1986083974 U JP1986083974 U JP 1986083974U JP 8397486 U JP8397486 U JP 8397486U JP H0448925 Y2 JPH0448925 Y2 JP H0448925Y2
Authority
JP
Japan
Prior art keywords
surface plate
workpiece
polishing
carrier
gears
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986083974U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62195446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986083974U priority Critical patent/JPH0448925Y2/ja
Publication of JPS62195446U publication Critical patent/JPS62195446U/ja
Application granted granted Critical
Publication of JPH0448925Y2 publication Critical patent/JPH0448925Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1986083974U 1986-06-02 1986-06-02 Expired JPH0448925Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986083974U JPH0448925Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-02 1986-06-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986083974U JPH0448925Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-02 1986-06-02

Publications (2)

Publication Number Publication Date
JPS62195446U JPS62195446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-12
JPH0448925Y2 true JPH0448925Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-11-18

Family

ID=30938056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986083974U Expired JPH0448925Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-02 1986-06-02

Country Status (1)

Country Link
JP (1) JPH0448925Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5630414B2 (ja) 2011-10-04 2014-11-26 信越半導体株式会社 ウェーハの加工方法
JP6269450B2 (ja) * 2014-11-18 2018-01-31 信越半導体株式会社 ワークの加工装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010869B2 (ja) * 1978-10-06 1985-03-20 日本真空技術株式会社 研磨機械用の安全装置
JPS5776406A (en) * 1980-10-30 1982-05-13 Supiide Fuamu Kk Displacement detector in both side lapping plate

Also Published As

Publication number Publication date
JPS62195446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-12

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