JPH0448516B2 - - Google Patents

Info

Publication number
JPH0448516B2
JPH0448516B2 JP63033942A JP3394288A JPH0448516B2 JP H0448516 B2 JPH0448516 B2 JP H0448516B2 JP 63033942 A JP63033942 A JP 63033942A JP 3394288 A JP3394288 A JP 3394288A JP H0448516 B2 JPH0448516 B2 JP H0448516B2
Authority
JP
Japan
Prior art keywords
liquid
processing
precision
tank
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63033942A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01210091A (ja
Inventor
Tooru Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SONIC FERRO KK
Original Assignee
SONIC FERRO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SONIC FERRO KK filed Critical SONIC FERRO KK
Priority to JP63033942A priority Critical patent/JPH01210091A/ja
Publication of JPH01210091A publication Critical patent/JPH01210091A/ja
Publication of JPH0448516B2 publication Critical patent/JPH0448516B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP63033942A 1988-02-18 1988-02-18 精密機器の液処理方法 Granted JPH01210091A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63033942A JPH01210091A (ja) 1988-02-18 1988-02-18 精密機器の液処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63033942A JPH01210091A (ja) 1988-02-18 1988-02-18 精密機器の液処理方法

Publications (2)

Publication Number Publication Date
JPH01210091A JPH01210091A (ja) 1989-08-23
JPH0448516B2 true JPH0448516B2 (enrdf_load_stackoverflow) 1992-08-06

Family

ID=12400562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63033942A Granted JPH01210091A (ja) 1988-02-18 1988-02-18 精密機器の液処理方法

Country Status (1)

Country Link
JP (1) JPH01210091A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0360776A (ja) * 1989-07-27 1991-03-15 Mita Ind Co Ltd 洗浄液循環装置
JPH0426082U (enrdf_load_stackoverflow) * 1990-06-26 1992-03-02
JPH0736399B2 (ja) * 1991-12-12 1995-04-19 孝夫 中澤 半導体ウエハ用洗浄リンス槽

Also Published As

Publication number Publication date
JPH01210091A (ja) 1989-08-23

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