JPH0448175B2 - - Google Patents
Info
- Publication number
- JPH0448175B2 JPH0448175B2 JP60012688A JP1268885A JPH0448175B2 JP H0448175 B2 JPH0448175 B2 JP H0448175B2 JP 60012688 A JP60012688 A JP 60012688A JP 1268885 A JP1268885 A JP 1268885A JP H0448175 B2 JPH0448175 B2 JP H0448175B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- signal
- sensing
- thin film
- sensing parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 6
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910003266 NiCo Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60012688A JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60012688A JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61173113A JPS61173113A (ja) | 1986-08-04 |
| JPH0448175B2 true JPH0448175B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-08-06 |
Family
ID=11812313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60012688A Granted JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61173113A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0682268A (ja) * | 1991-02-28 | 1994-03-22 | Japan Servo Co Ltd | 磁気式位置検出装置 |
| DE69702919T2 (de) * | 1997-12-22 | 2001-01-25 | Tesa Brown & Sharpe Sa | Schaltung für Dimensionsmessgerät mit magnetoresistiven Elektroden |
| DE60015612T2 (de) * | 2000-06-27 | 2005-12-01 | Tesa Sa | Messvorrichtung mit magnetoresistiven elektroden |
| JP4487093B2 (ja) * | 2004-02-02 | 2010-06-23 | 日本電産サンキョー株式会社 | 磁気センサ |
| JP4921327B2 (ja) * | 2007-11-27 | 2012-04-25 | シーケーディ株式会社 | 磁気リニア測定装置 |
| WO2010150725A1 (ja) * | 2009-06-24 | 2010-12-29 | アルプス電気株式会社 | 磁気検出装置 |
| JP2015045529A (ja) | 2013-08-27 | 2015-03-12 | Tdk株式会社 | 回転磁界センサ |
-
1985
- 1985-01-28 JP JP60012688A patent/JPS61173113A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61173113A (ja) | 1986-08-04 |