JPH0446005Y2 - - Google Patents

Info

Publication number
JPH0446005Y2
JPH0446005Y2 JP1985010645U JP1064585U JPH0446005Y2 JP H0446005 Y2 JPH0446005 Y2 JP H0446005Y2 JP 1985010645 U JP1985010645 U JP 1985010645U JP 1064585 U JP1064585 U JP 1064585U JP H0446005 Y2 JPH0446005 Y2 JP H0446005Y2
Authority
JP
Japan
Prior art keywords
frame
ceiling
filter
clean room
frame material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985010645U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61129013U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985010645U priority Critical patent/JPH0446005Y2/ja
Publication of JPS61129013U publication Critical patent/JPS61129013U/ja
Application granted granted Critical
Publication of JPH0446005Y2 publication Critical patent/JPH0446005Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP1985010645U 1985-01-30 1985-01-30 Expired JPH0446005Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985010645U JPH0446005Y2 (en:Method) 1985-01-30 1985-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985010645U JPH0446005Y2 (en:Method) 1985-01-30 1985-01-30

Publications (2)

Publication Number Publication Date
JPS61129013U JPS61129013U (en:Method) 1986-08-13
JPH0446005Y2 true JPH0446005Y2 (en:Method) 1992-10-29

Family

ID=30492021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985010645U Expired JPH0446005Y2 (en:Method) 1985-01-30 1985-01-30

Country Status (1)

Country Link
JP (1) JPH0446005Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0443525Y2 (en:Method) * 1985-03-29 1992-10-14

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010646A (ja) * 1983-06-30 1985-01-19 Sony Corp 多層配線方法

Also Published As

Publication number Publication date
JPS61129013U (en:Method) 1986-08-13

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