JPH0445234Y2 - - Google Patents

Info

Publication number
JPH0445234Y2
JPH0445234Y2 JP3555286U JP3555286U JPH0445234Y2 JP H0445234 Y2 JPH0445234 Y2 JP H0445234Y2 JP 3555286 U JP3555286 U JP 3555286U JP 3555286 U JP3555286 U JP 3555286U JP H0445234 Y2 JPH0445234 Y2 JP H0445234Y2
Authority
JP
Japan
Prior art keywords
aligner
optical sensor
exposure
exposure time
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3555286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62147339U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3555286U priority Critical patent/JPH0445234Y2/ja
Publication of JPS62147339U publication Critical patent/JPS62147339U/ja
Application granted granted Critical
Publication of JPH0445234Y2 publication Critical patent/JPH0445234Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Unknown Time Intervals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3555286U 1986-03-12 1986-03-12 Expired JPH0445234Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3555286U JPH0445234Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-03-12 1986-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3555286U JPH0445234Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-03-12 1986-03-12

Publications (2)

Publication Number Publication Date
JPS62147339U JPS62147339U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-17
JPH0445234Y2 true JPH0445234Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-23

Family

ID=30845154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3555286U Expired JPH0445234Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-03-12 1986-03-12

Country Status (1)

Country Link
JP (1) JPH0445234Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS62147339U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-17

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