JPH0444614Y2 - - Google Patents
Info
- Publication number
- JPH0444614Y2 JPH0444614Y2 JP12288087U JP12288087U JPH0444614Y2 JP H0444614 Y2 JPH0444614 Y2 JP H0444614Y2 JP 12288087 U JP12288087 U JP 12288087U JP 12288087 U JP12288087 U JP 12288087U JP H0444614 Y2 JPH0444614 Y2 JP H0444614Y2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- adhesion
- vapor deposition
- chemical vapor
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims description 10
- 230000002265 prevention Effects 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 239000007795 chemical reaction product Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12288087U JPH0444614Y2 (enExample) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12288087U JPH0444614Y2 (enExample) | 1987-08-11 | 1987-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430356U JPS6430356U (enExample) | 1989-02-23 |
| JPH0444614Y2 true JPH0444614Y2 (enExample) | 1992-10-21 |
Family
ID=31371223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12288087U Expired JPH0444614Y2 (enExample) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444614Y2 (enExample) |
-
1987
- 1987-08-11 JP JP12288087U patent/JPH0444614Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6430356U (enExample) | 1989-02-23 |
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