JPS6430356U - - Google Patents
Info
- Publication number
- JPS6430356U JPS6430356U JP1987122880U JP12288087U JPS6430356U JP S6430356 U JPS6430356 U JP S6430356U JP 1987122880 U JP1987122880 U JP 1987122880U JP 12288087 U JP12288087 U JP 12288087U JP S6430356 U JPS6430356 U JP S6430356U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- vapor deposition
- chemical vapor
- deposition apparatus
- adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122880U JPH0444614Y2 (enExample) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122880U JPH0444614Y2 (enExample) | 1987-08-11 | 1987-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430356U true JPS6430356U (enExample) | 1989-02-23 |
| JPH0444614Y2 JPH0444614Y2 (enExample) | 1992-10-21 |
Family
ID=31371223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987122880U Expired JPH0444614Y2 (enExample) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444614Y2 (enExample) |
-
1987
- 1987-08-11 JP JP1987122880U patent/JPH0444614Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0444614Y2 (enExample) | 1992-10-21 |