JPH0443411B2 - - Google Patents

Info

Publication number
JPH0443411B2
JPH0443411B2 JP58235562A JP23556283A JPH0443411B2 JP H0443411 B2 JPH0443411 B2 JP H0443411B2 JP 58235562 A JP58235562 A JP 58235562A JP 23556283 A JP23556283 A JP 23556283A JP H0443411 B2 JPH0443411 B2 JP H0443411B2
Authority
JP
Japan
Prior art keywords
substrate
clusters
cluster
thin film
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58235562A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60124913A (ja
Inventor
Kenichiro Yamanishi
Akira Shuhara
Yoshifumi Minowa
Sanju Ko
Masahiro Hanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58235562A priority Critical patent/JPS60124913A/ja
Publication of JPS60124913A publication Critical patent/JPS60124913A/ja
Publication of JPH0443411B2 publication Critical patent/JPH0443411B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/22—

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP58235562A 1983-12-12 1983-12-12 薄膜蒸着装置 Granted JPS60124913A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58235562A JPS60124913A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58235562A JPS60124913A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Publications (2)

Publication Number Publication Date
JPS60124913A JPS60124913A (ja) 1985-07-04
JPH0443411B2 true JPH0443411B2 (member.php) 1992-07-16

Family

ID=16987824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58235562A Granted JPS60124913A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Country Status (1)

Country Link
JP (1) JPS60124913A (member.php)

Also Published As

Publication number Publication date
JPS60124913A (ja) 1985-07-04

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