JPH0442909Y2 - - Google Patents

Info

Publication number
JPH0442909Y2
JPH0442909Y2 JP1984046455U JP4645584U JPH0442909Y2 JP H0442909 Y2 JPH0442909 Y2 JP H0442909Y2 JP 1984046455 U JP1984046455 U JP 1984046455U JP 4645584 U JP4645584 U JP 4645584U JP H0442909 Y2 JPH0442909 Y2 JP H0442909Y2
Authority
JP
Japan
Prior art keywords
liquid
liquid supply
filter
nozzle
supply means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984046455U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60158734U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4645584U priority Critical patent/JPS60158734U/ja
Publication of JPS60158734U publication Critical patent/JPS60158734U/ja
Application granted granted Critical
Publication of JPH0442909Y2 publication Critical patent/JPH0442909Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photographic Processing Devices Using Wet Methods (AREA)
  • Coating Apparatus (AREA)
JP4645584U 1984-03-29 1984-03-29 基板表面処理液供給装置 Granted JPS60158734U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4645584U JPS60158734U (ja) 1984-03-29 1984-03-29 基板表面処理液供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4645584U JPS60158734U (ja) 1984-03-29 1984-03-29 基板表面処理液供給装置

Publications (2)

Publication Number Publication Date
JPS60158734U JPS60158734U (ja) 1985-10-22
JPH0442909Y2 true JPH0442909Y2 (enrdf_load_stackoverflow) 1992-10-12

Family

ID=30560862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4645584U Granted JPS60158734U (ja) 1984-03-29 1984-03-29 基板表面処理液供給装置

Country Status (1)

Country Link
JP (1) JPS60158734U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356040Y2 (enrdf_load_stackoverflow) * 1987-01-30 1991-12-16
JP2558490B2 (ja) * 1988-03-07 1996-11-27 東京エレクトロン株式会社 現像装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5898641U (ja) * 1981-12-25 1983-07-05 凸版印刷株式会社 レジスト供給装置

Also Published As

Publication number Publication date
JPS60158734U (ja) 1985-10-22

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