JPH0441933B2 - - Google Patents
Info
- Publication number
- JPH0441933B2 JPH0441933B2 JP60178523A JP17852385A JPH0441933B2 JP H0441933 B2 JPH0441933 B2 JP H0441933B2 JP 60178523 A JP60178523 A JP 60178523A JP 17852385 A JP17852385 A JP 17852385A JP H0441933 B2 JPH0441933 B2 JP H0441933B2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- temperature
- membrane
- film
- air flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 17
- 230000017525 heat dissipation Effects 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 36
- 238000010438 heat treatment Methods 0.000 description 19
- 230000001419 dependent effect Effects 0.000 description 18
- 230000007423 decrease Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 238000002485 combustion reaction Methods 0.000 description 5
- 230000004043 responsiveness Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60178523A JPS6239721A (ja) | 1985-08-15 | 1985-08-15 | 直熱型流量センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60178523A JPS6239721A (ja) | 1985-08-15 | 1985-08-15 | 直熱型流量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6239721A JPS6239721A (ja) | 1987-02-20 |
| JPH0441933B2 true JPH0441933B2 (enrdf_load_html_response) | 1992-07-09 |
Family
ID=16049958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60178523A Granted JPS6239721A (ja) | 1985-08-15 | 1985-08-15 | 直熱型流量センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6239721A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0642209Y2 (ja) * | 1989-02-03 | 1994-11-02 | 東レ株式会社 | フローセンサ |
-
1985
- 1985-08-15 JP JP60178523A patent/JPS6239721A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6239721A (ja) | 1987-02-20 |
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