JPH0441177Y2 - - Google Patents

Info

Publication number
JPH0441177Y2
JPH0441177Y2 JP1987061823U JP6182387U JPH0441177Y2 JP H0441177 Y2 JPH0441177 Y2 JP H0441177Y2 JP 1987061823 U JP1987061823 U JP 1987061823U JP 6182387 U JP6182387 U JP 6182387U JP H0441177 Y2 JPH0441177 Y2 JP H0441177Y2
Authority
JP
Japan
Prior art keywords
reaction tube
wafer boat
wafer
heat
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987061823U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63170466U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987061823U priority Critical patent/JPH0441177Y2/ja
Publication of JPS63170466U publication Critical patent/JPS63170466U/ja
Application granted granted Critical
Publication of JPH0441177Y2 publication Critical patent/JPH0441177Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1987061823U 1987-04-23 1987-04-23 Expired JPH0441177Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987061823U JPH0441177Y2 (enExample) 1987-04-23 1987-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987061823U JPH0441177Y2 (enExample) 1987-04-23 1987-04-23

Publications (2)

Publication Number Publication Date
JPS63170466U JPS63170466U (enExample) 1988-11-07
JPH0441177Y2 true JPH0441177Y2 (enExample) 1992-09-28

Family

ID=30895511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987061823U Expired JPH0441177Y2 (enExample) 1987-04-23 1987-04-23

Country Status (1)

Country Link
JP (1) JPH0441177Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6585823B1 (en) * 2000-07-07 2003-07-01 Asm International, N.V. Atomic layer deposition

Also Published As

Publication number Publication date
JPS63170466U (enExample) 1988-11-07

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