JPS63170466U - - Google Patents
Info
- Publication number
- JPS63170466U JPS63170466U JP6182387U JP6182387U JPS63170466U JP S63170466 U JPS63170466 U JP S63170466U JP 6182387 U JP6182387 U JP 6182387U JP 6182387 U JP6182387 U JP 6182387U JP S63170466 U JPS63170466 U JP S63170466U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- wafer boat
- conduction plate
- reduced pressure
- pressure cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 239000004020 conductor Substances 0.000 claims 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6182387U JPH0441177Y2 (enExample) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6182387U JPH0441177Y2 (enExample) | 1987-04-23 | 1987-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170466U true JPS63170466U (enExample) | 1988-11-07 |
| JPH0441177Y2 JPH0441177Y2 (enExample) | 1992-09-28 |
Family
ID=30895511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6182387U Expired JPH0441177Y2 (enExample) | 1987-04-23 | 1987-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441177Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002060947A (ja) * | 2000-07-07 | 2002-02-28 | Asm Internatl Nv | 原子層のｃｖｄ |
-
1987
- 1987-04-23 JP JP6182387U patent/JPH0441177Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002060947A (ja) * | 2000-07-07 | 2002-02-28 | Asm Internatl Nv | 原子層のｃｖｄ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441177Y2 (enExample) | 1992-09-28 |
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