JPS6170928U - - Google Patents
Info
- Publication number
- JPS6170928U JPS6170928U JP15677284U JP15677284U JPS6170928U JP S6170928 U JPS6170928 U JP S6170928U JP 15677284 U JP15677284 U JP 15677284U JP 15677284 U JP15677284 U JP 15677284U JP S6170928 U JPS6170928 U JP S6170928U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- heater
- room
- heating
- held
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15677284U JPS6170928U (enExample) | 1984-10-16 | 1984-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15677284U JPS6170928U (enExample) | 1984-10-16 | 1984-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6170928U true JPS6170928U (enExample) | 1986-05-15 |
Family
ID=30714778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15677284U Pending JPS6170928U (enExample) | 1984-10-16 | 1984-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170928U (enExample) |
-
1984
- 1984-10-16 JP JP15677284U patent/JPS6170928U/ja active Pending