JPH0440529U - - Google Patents

Info

Publication number
JPH0440529U
JPH0440529U JP8317390U JP8317390U JPH0440529U JP H0440529 U JPH0440529 U JP H0440529U JP 8317390 U JP8317390 U JP 8317390U JP 8317390 U JP8317390 U JP 8317390U JP H0440529 U JPH0440529 U JP H0440529U
Authority
JP
Japan
Prior art keywords
susceptor
quartz glass
transparent quartz
glass container
baking device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8317390U
Other languages
English (en)
Other versions
JP2514359Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990083173U priority Critical patent/JP2514359Y2/ja
Publication of JPH0440529U publication Critical patent/JPH0440529U/ja
Application granted granted Critical
Publication of JP2514359Y2 publication Critical patent/JP2514359Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案真空ベーキング装置の一実施例
を示す側断面図、第２図ａ，，ｂ，ｃはＭＯＶＰ
Ｅ法に用いられる反応炉を示すもので、ａは横型
、ｂはパンケーキ型、ｃはバレル型の概略図、第
３図はＧａＡｓ，ＦＥＴ用エピタキシヤルウエハ
の構造を示す断面図、第４図は従来の真空ベーキ
ング装置の一例を示す側断面図である。 １……透明石英ガラス容器、２……下チヤンバ
ー、３……扉、４……サセプタ受台、５……サセ
プタ、６……ヒータ、７……排出管、８……油回
転ポンプ、９……拡散ポンプ、１０……透明石英
ガラス内管、１１……バルブ、１２……反応容器
、１３……ヒータ、１４……基板、１５……原料
供給口、１６……排気口、１７……バツフア層、
１８……活性層。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空排気可能な透明石英ガラス容器の外側にヒ
    ータを設け、該ガラス容器内にサセプタ受台を設
    けて設置したサセプタを真空中で加熱浄化するベ
    ーキング装置において、透明石英ガラス容器内の
    サセプタ受台上にサセプタを覆う透明石英ガラス
    管を配置して加熱することを特徴とするサセプタ
    浄化用真空ベーキング装置。
JP1990083173U 1990-08-06 1990-08-06 サセプタ浄化用真空ベ―キング装置 Expired - Fee Related JP2514359Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990083173U JP2514359Y2 (ja) 1990-08-06 1990-08-06 サセプタ浄化用真空ベ―キング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990083173U JP2514359Y2 (ja) 1990-08-06 1990-08-06 サセプタ浄化用真空ベ―キング装置

Publications (2)

Publication Number Publication Date
JPH0440529U true JPH0440529U (ja) 1992-04-07
JP2514359Y2 JP2514359Y2 (ja) 1996-10-16

Family

ID=31630616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990083173U Expired - Fee Related JP2514359Y2 (ja) 1990-08-06 1990-08-06 サセプタ浄化用真空ベ―キング装置

Country Status (1)

Country Link
JP (1) JP2514359Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS623163A (ja) * 1985-06-29 1987-01-09 Yamaha Motor Co Ltd 空気清浄器の吸気ダクト構造
JPS63188934A (ja) * 1987-01-31 1988-08-04 Toyoda Gosei Co Ltd 気相成長装置
JPH01117089A (ja) * 1987-10-29 1989-05-09 Mitsumi Electric Co Ltd Ｆｐｃ基板の製造法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS623163A (ja) * 1985-06-29 1987-01-09 Yamaha Motor Co Ltd 空気清浄器の吸気ダクト構造
JPS63188934A (ja) * 1987-01-31 1988-08-04 Toyoda Gosei Co Ltd 気相成長装置
JPH01117089A (ja) * 1987-10-29 1989-05-09 Mitsumi Electric Co Ltd Ｆｐｃ基板の製造法

Also Published As

Publication number Publication date
JP2514359Y2 (ja) 1996-10-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees