JPS6151730U - - Google Patents

Info

Publication number
JPS6151730U
JPS6151730U JP13698884U JP13698884U JPS6151730U JP S6151730 U JPS6151730 U JP S6151730U JP 13698884 U JP13698884 U JP 13698884U JP 13698884 U JP13698884 U JP 13698884U JP S6151730 U JPS6151730 U JP S6151730U
Authority
JP
Japan
Prior art keywords
lamp house
vacuum
reaction vessel
cvd apparatus
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13698884U
Other languages
English (en)
Other versions
JPH0717146Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984136988U priority Critical patent/JPH0717146Y2/ja
Publication of JPS6151730U publication Critical patent/JPS6151730U/ja
Application granted granted Critical
Publication of JPH0717146Y2 publication Critical patent/JPH0717146Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の実施例を示す斜視図、第２
図は第１図の−線断面図である。 １…反応容器、３…サセプタ、４…ガス導入管
、５…排気管、６…ランプハウス、７，８…電極
、９…ガス導入口、１０…排気口、１１…窓。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ サセプタを内蔵した真空の反応容器に、ガス
    導入管と排気管を設け、該反応容器に、窓を介し
    て真空のランプハウスを設け、該ランプハウスに
    対向する電極とガス導入口および排気口とを設け
    たことを特徴とする光ＣＶＤ装置。 ２ 反応容器とランプハウスとの真空度が略々同
    等であることを特徴とする実用新案登録請求の範
    囲第１項記載の光ＣＶＤ装置。 ３ 窓が平板状であることを特徴とする実用新案
    登録請求の範囲第１項記載の光ＣＶＤ装置。
JP1984136988U 1984-09-10 1984-09-10 ウエハ処理装置 Expired - Lifetime JPH0717146Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984136988U JPH0717146Y2 (ja) 1984-09-10 1984-09-10 ウエハ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984136988U JPH0717146Y2 (ja) 1984-09-10 1984-09-10 ウエハ処理装置

Publications (2)

Publication Number Publication Date
JPS6151730U true JPS6151730U (ja) 1986-04-07
JPH0717146Y2 JPH0717146Y2 (ja) 1995-04-19

Family

ID=30695416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984136988U Expired - Lifetime JPH0717146Y2 (ja) 1984-09-10 1984-09-10 ウエハ処理装置

Country Status (1)

Country Link
JP (1) JPH0717146Y2 (ja)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JPN.J.APPL.PHYS=1983 *

Also Published As

Publication number Publication date
JPH0717146Y2 (ja) 1995-04-19

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