JPH0439181B2 - - Google Patents

Info

Publication number
JPH0439181B2
JPH0439181B2 JP57209413A JP20941382A JPH0439181B2 JP H0439181 B2 JPH0439181 B2 JP H0439181B2 JP 57209413 A JP57209413 A JP 57209413A JP 20941382 A JP20941382 A JP 20941382A JP H0439181 B2 JPH0439181 B2 JP H0439181B2
Authority
JP
Japan
Prior art keywords
ion
extraction electrode
species
ion beam
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57209413A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59101749A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57209413A priority Critical patent/JPS59101749A/ja
Publication of JPS59101749A publication Critical patent/JPS59101749A/ja
Publication of JPH0439181B2 publication Critical patent/JPH0439181B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57209413A 1982-12-01 1982-12-01 イオン源およびイオンビーム形成方法 Granted JPS59101749A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57209413A JPS59101749A (ja) 1982-12-01 1982-12-01 イオン源およびイオンビーム形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57209413A JPS59101749A (ja) 1982-12-01 1982-12-01 イオン源およびイオンビーム形成方法

Publications (2)

Publication Number Publication Date
JPS59101749A JPS59101749A (ja) 1984-06-12
JPH0439181B2 true JPH0439181B2 (enrdf_load_stackoverflow) 1992-06-26

Family

ID=16572465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57209413A Granted JPS59101749A (ja) 1982-12-01 1982-12-01 イオン源およびイオンビーム形成方法

Country Status (1)

Country Link
JP (1) JPS59101749A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4785220A (en) * 1985-01-30 1988-11-15 Brown Ian G Multi-cathode metal vapor arc ion source
US8330118B2 (en) * 2008-05-16 2012-12-11 Semequip, Inc. Multi mode ion source
CN113692636B (zh) * 2019-04-16 2024-05-07 艾克塞利斯科技公司 多电弧室的源

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546425A (en) * 1978-09-29 1980-04-01 Jeol Ltd Electron-bombardment ion source for solid sample
JPS5574050A (en) * 1978-11-29 1980-06-04 Toshiba Corp Ion source device for particle accelerator
JPS5911400Y2 (ja) * 1980-02-26 1984-04-07 日本電子株式会社 電界放射型イオン源
JPS56127661U (enrdf_load_stackoverflow) * 1980-02-29 1981-09-29
JPS5911401Y2 (ja) * 1980-02-29 1984-04-07 日本電子株式会社 電界放射型イオン源
JPS584424B2 (ja) * 1980-07-31 1983-01-26 理化学研究所 イオンビ−ム形成方法
JPS5774944A (en) * 1980-10-25 1982-05-11 Toshiba Corp Field radiation type ion generator

Also Published As

Publication number Publication date
JPS59101749A (ja) 1984-06-12

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