JPH02815B2 - - Google Patents

Info

Publication number
JPH02815B2
JPH02815B2 JP60254763A JP25476385A JPH02815B2 JP H02815 B2 JPH02815 B2 JP H02815B2 JP 60254763 A JP60254763 A JP 60254763A JP 25476385 A JP25476385 A JP 25476385A JP H02815 B2 JPH02815 B2 JP H02815B2
Authority
JP
Japan
Prior art keywords
ionized
ion source
anode
needle
liquid metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60254763A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61116733A (ja
Inventor
Tooru Ishitani
Hifumi Tamura
Akira Shimase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60254763A priority Critical patent/JPS61116733A/ja
Publication of JPS61116733A publication Critical patent/JPS61116733A/ja
Publication of JPH02815B2 publication Critical patent/JPH02815B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP60254763A 1985-11-15 1985-11-15 液体金属イオン源 Granted JPS61116733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60254763A JPS61116733A (ja) 1985-11-15 1985-11-15 液体金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60254763A JPS61116733A (ja) 1985-11-15 1985-11-15 液体金属イオン源

Publications (2)

Publication Number Publication Date
JPS61116733A JPS61116733A (ja) 1986-06-04
JPH02815B2 true JPH02815B2 (enrdf_load_stackoverflow) 1990-01-09

Family

ID=17269541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60254763A Granted JPS61116733A (ja) 1985-11-15 1985-11-15 液体金属イオン源

Country Status (1)

Country Link
JP (1) JPS61116733A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61116733A (ja) 1986-06-04

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