JPS61116733A - 液体金属イオン源 - Google Patents

液体金属イオン源

Info

Publication number
JPS61116733A
JPS61116733A JP60254763A JP25476385A JPS61116733A JP S61116733 A JPS61116733 A JP S61116733A JP 60254763 A JP60254763 A JP 60254763A JP 25476385 A JP25476385 A JP 25476385A JP S61116733 A JPS61116733 A JP S61116733A
Authority
JP
Japan
Prior art keywords
anode
ion source
liquid metal
ionized
metal ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60254763A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02815B2 (enrdf_load_stackoverflow
Inventor
Toru Ishitani
亨 石谷
Hifumi Tamura
田村　一二三
Akira Shimase
朗 嶋瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60254763A priority Critical patent/JPS61116733A/ja
Publication of JPS61116733A publication Critical patent/JPS61116733A/ja
Publication of JPH02815B2 publication Critical patent/JPH02815B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP60254763A 1985-11-15 1985-11-15 液体金属イオン源 Granted JPS61116733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60254763A JPS61116733A (ja) 1985-11-15 1985-11-15 液体金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60254763A JPS61116733A (ja) 1985-11-15 1985-11-15 液体金属イオン源

Publications (2)

Publication Number Publication Date
JPS61116733A true JPS61116733A (ja) 1986-06-04
JPH02815B2 JPH02815B2 (enrdf_load_stackoverflow) 1990-01-09

Family

ID=17269541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60254763A Granted JPS61116733A (ja) 1985-11-15 1985-11-15 液体金属イオン源

Country Status (1)

Country Link
JP (1) JPS61116733A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH02815B2 (enrdf_load_stackoverflow) 1990-01-09

Similar Documents

Publication Publication Date Title
US4631448A (en) Ion source
US2960457A (en) Apparatus for vaporizing coating materials
JPS61116733A (ja) 液体金属イオン源
JPH051895Y2 (enrdf_load_stackoverflow)
JPS59101749A (ja) イオン源およびイオンビーム形成方法
JPS5842149A (ja) セシウムイオン源
US4560907A (en) Ion source
JPS6240344Y2 (enrdf_load_stackoverflow)
JPS6363105B2 (enrdf_load_stackoverflow)
US4171462A (en) Linear electron beam gun evaporator having uniform electron emission
JPS54127272A (en) Hot-cathode electron source unit
SU529712A1 (ru) Источник ионов металлов
JPS5838905B2 (ja) 金属イオン源
JPS5818211Y2 (ja) 電子銃
JPS5533719A (en) Electron gun
JPS6329373B2 (enrdf_load_stackoverflow)
JPS602745B2 (ja) イオン源装置
JPS58198824A (ja) 電子衝撃型電界放出イオン源
JPS6364027B2 (enrdf_load_stackoverflow)
JPS6476643A (en) Electron current source
JPS60167249A (ja) 固体試料用電界電離イオン源
JPS5978431A (ja) 電子衝撃、電界放出形イオン源
JP2618006B2 (ja) 負電荷発生装置
JPH0238925Y2 (enrdf_load_stackoverflow)
JPS59203344A (ja) イオン源