JPH0439025B2 - - Google Patents

Info

Publication number
JPH0439025B2
JPH0439025B2 JP57045120A JP4512082A JPH0439025B2 JP H0439025 B2 JPH0439025 B2 JP H0439025B2 JP 57045120 A JP57045120 A JP 57045120A JP 4512082 A JP4512082 A JP 4512082A JP H0439025 B2 JPH0439025 B2 JP H0439025B2
Authority
JP
Japan
Prior art keywords
light
polarizing film
workpiece
polarized light
polarized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57045120A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58161838A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4512082A priority Critical patent/JPS58161838A/ja
Publication of JPS58161838A publication Critical patent/JPS58161838A/ja
Publication of JPH0439025B2 publication Critical patent/JPH0439025B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP4512082A 1982-03-20 1982-03-20 偏光膜プリズム測定装置 Granted JPS58161838A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4512082A JPS58161838A (ja) 1982-03-20 1982-03-20 偏光膜プリズム測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4512082A JPS58161838A (ja) 1982-03-20 1982-03-20 偏光膜プリズム測定装置

Publications (2)

Publication Number Publication Date
JPS58161838A JPS58161838A (ja) 1983-09-26
JPH0439025B2 true JPH0439025B2 (enrdf_load_stackoverflow) 1992-06-26

Family

ID=12710406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4512082A Granted JPS58161838A (ja) 1982-03-20 1982-03-20 偏光膜プリズム測定装置

Country Status (1)

Country Link
JP (1) JPS58161838A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS58161838A (ja) 1983-09-26

Similar Documents

Publication Publication Date Title
JP2752003B2 (ja) 走査機能を備えた検査干渉計
US6621578B1 (en) Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer
JPH0319482B2 (enrdf_load_stackoverflow)
EP2327953B1 (en) Apparatus and method for determining a height map of a surface through both interferometric and non interferometric measurements.
JPS6483135A (en) Measuring apparatus of polarized infrared ray for thin film
JPH0439025B2 (enrdf_load_stackoverflow)
GB2109545A (en) Surface profile interferometer
JPH06308025A (ja) 光透過率測定装置の較正方法
JPH0530761U (ja) 欠陥観察装置
JP3340824B2 (ja) 全反射プリズムを含む光学系
US3438712A (en) Magneto-optical displacement sensing device
SU1727105A1 (ru) Автоколлимационное устройство
JPS63113503A (ja) ウオ−ラストンプリズム
JP2521324Y2 (ja) 干渉計
CN116879240B (zh) 一种光学晶体的检测系统
JP2712987B2 (ja) 偏光測定装置の調整方法
JPH0444688B2 (enrdf_load_stackoverflow)
JP2954635B2 (ja) 偏波面保存光ファイバのクロストーク測定器
JPH0522213B2 (enrdf_load_stackoverflow)
JPH02116736A (ja) 結晶方位決定方法およびその装置
JP2691899B2 (ja) 干渉計
RU1809373C (ru) Способ оптического контрол отражающей поверхности и устройство дл его осуществлени
JPS60153187A (ja) レ−ザ−装置
JPS632087B2 (enrdf_load_stackoverflow)
JPH0464019B2 (enrdf_load_stackoverflow)