JPH0444688B2 - - Google Patents
Info
- Publication number
- JPH0444688B2 JPH0444688B2 JP57071972A JP7197282A JPH0444688B2 JP H0444688 B2 JPH0444688 B2 JP H0444688B2 JP 57071972 A JP57071972 A JP 57071972A JP 7197282 A JP7197282 A JP 7197282A JP H0444688 B2 JPH0444688 B2 JP H0444688B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- workpiece
- polarizing film
- polarizing
- prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7197282A JPS58189536A (ja) | 1982-04-28 | 1982-04-28 | 偏光プリズム透過率測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7197282A JPS58189536A (ja) | 1982-04-28 | 1982-04-28 | 偏光プリズム透過率測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58189536A JPS58189536A (ja) | 1983-11-05 |
JPH0444688B2 true JPH0444688B2 (enrdf_load_stackoverflow) | 1992-07-22 |
Family
ID=13475885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7197282A Granted JPS58189536A (ja) | 1982-04-28 | 1982-04-28 | 偏光プリズム透過率測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58189536A (enrdf_load_stackoverflow) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51118449A (en) * | 1975-04-10 | 1976-10-18 | Sanyo Electric Co Ltd | Polarizing prism |
JPS53140051A (en) * | 1977-05-13 | 1978-12-06 | Sumitomo Electric Ind Ltd | Method and system for measuring transmission loss of optical fiber |
-
1982
- 1982-04-28 JP JP7197282A patent/JPS58189536A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58189536A (ja) | 1983-11-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100225923B1 (ko) | 이상 회절 간섭계 | |
EP0681166B1 (en) | Improvements in or relating to optical interferometers | |
US5386317A (en) | Method and apparatus for imaging dense linewidth features using an optical microscope | |
EP0902874B1 (en) | Interferometer for measuring thickness variations of semiconductor wafers | |
JPH073344B2 (ja) | エンコ−ダ− | |
JPH0319482B2 (enrdf_load_stackoverflow) | ||
JPH11281501A (ja) | 表面応力測定装置 | |
JP4399126B2 (ja) | 分光エリプソメータ | |
US4798468A (en) | Interference apparatus for detecting state of wave surface | |
JPH0554902B2 (enrdf_load_stackoverflow) | ||
CN103759661A (zh) | 一种用于介质内测量薄膜厚度和折射率的装置 | |
US4932780A (en) | Interferometer | |
JPH0444688B2 (enrdf_load_stackoverflow) | ||
US4105335A (en) | Interferometric optical phase discrimination apparatus | |
SU1695145A1 (ru) | Эллипсометр | |
JPH0530761U (ja) | 欠陥観察装置 | |
SU1727105A1 (ru) | Автоколлимационное устройство | |
RU2085873C1 (ru) | Многолучевое интерференционное устройство | |
JPH095018A (ja) | 移動量測長装置 | |
JP2000088513A (ja) | 非球面波発生レンズ系組立調整装置 | |
JPH0464019B2 (enrdf_load_stackoverflow) | ||
JPH0439025B2 (enrdf_load_stackoverflow) | ||
JP2521324Y2 (ja) | 干渉計 | |
JPH0566476A (ja) | 照明装置 | |
JP2008298434A (ja) | 偏光分離素子を含む光学装置 |