JPH0437922B2 - - Google Patents

Info

Publication number
JPH0437922B2
JPH0437922B2 JP59151211A JP15121184A JPH0437922B2 JP H0437922 B2 JPH0437922 B2 JP H0437922B2 JP 59151211 A JP59151211 A JP 59151211A JP 15121184 A JP15121184 A JP 15121184A JP H0437922 B2 JPH0437922 B2 JP H0437922B2
Authority
JP
Japan
Prior art keywords
transparent thin
thin film
film pattern
pattern
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59151211A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129712A (ja
Inventor
Yasuo Nakagawa
Mitsuyoshi Koizumi
Hitoshi Kubota
Shunji Maeda
Satoshi Fushimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15121184A priority Critical patent/JPS6129712A/ja
Publication of JPS6129712A publication Critical patent/JPS6129712A/ja
Publication of JPH0437922B2 publication Critical patent/JPH0437922B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15121184A 1984-07-23 1984-07-23 微細パタ−ンの欠陥検出方法及びその装置 Granted JPS6129712A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15121184A JPS6129712A (ja) 1984-07-23 1984-07-23 微細パタ−ンの欠陥検出方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15121184A JPS6129712A (ja) 1984-07-23 1984-07-23 微細パタ−ンの欠陥検出方法及びその装置

Publications (2)

Publication Number Publication Date
JPS6129712A JPS6129712A (ja) 1986-02-10
JPH0437922B2 true JPH0437922B2 (zh) 1992-06-22

Family

ID=15513662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15121184A Granted JPS6129712A (ja) 1984-07-23 1984-07-23 微細パタ−ンの欠陥検出方法及びその装置

Country Status (1)

Country Link
JP (1) JPS6129712A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009150725A (ja) * 2007-12-19 2009-07-09 Hitachi High-Technologies Corp 欠陥検査装置

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2605115A1 (fr) * 1986-10-01 1988-04-15 Primat Didier Dispositif d'acquisition optique multivoies a eclairage integre
JPS63190261A (ja) * 1987-01-31 1988-08-05 Pentel Kk 電池
JPH0541551Y2 (zh) * 1987-02-16 1993-10-20
JPH02170279A (ja) * 1988-12-23 1990-07-02 Hitachi Ltd 被検査対象パターンの欠陥検出方法及びその装置
US6411377B1 (en) 1991-04-02 2002-06-25 Hitachi, Ltd. Optical apparatus for defect and particle size inspection
JP2827843B2 (ja) * 1993-10-18 1998-11-25 村田機械株式会社 パッケージの汚れ検査方法
JP2822937B2 (ja) * 1995-07-17 1998-11-11 株式会社日立製作所 半導体装置の製造システム及び欠陥検査方法
JP4001653B2 (ja) * 1996-08-29 2007-10-31 ケーエルエー・インストルメンツ・コーポレーション 試料からの多重チャネル応答を用いた試料の光学的検査
JPH11237344A (ja) * 1998-02-19 1999-08-31 Hitachi Ltd 欠陥検査方法およびその装置
US6847442B1 (en) * 1998-06-16 2005-01-25 Orbotech, Ltd. Illuminator for inspecting substantially flat surfaces
JP3981696B2 (ja) * 1998-07-28 2007-09-26 株式会社日立製作所 欠陥検査装置およびその方法
JP3904581B2 (ja) * 1998-07-28 2007-04-11 株式会社日立製作所 欠陥検査装置およびその方法
JP3904565B2 (ja) * 1998-07-28 2007-04-11 株式会社日立製作所 欠陥検査装置およびその方法
AU1412000A (en) 1998-11-30 2000-06-19 Olympus Optical Co., Ltd. Measuring instrument
JP2005308725A (ja) * 2004-03-26 2005-11-04 Sumitomo Osaka Cement Co Ltd 透明板欠陥検査装置
JP4826750B2 (ja) * 2005-04-08 2011-11-30 オムロン株式会社 欠陥検査方法およびその方法を用いた欠陥検査装置
JP4716827B2 (ja) * 2005-09-13 2011-07-06 株式会社東京精密 外観検査装置及び外観検査方法
JP4723362B2 (ja) * 2005-11-29 2011-07-13 株式会社日立ハイテクノロジーズ 光学式検査装置及びその方法
US7782452B2 (en) * 2007-08-31 2010-08-24 Kla-Tencor Technologies Corp. Systems and method for simultaneously inspecting a specimen with two distinct channels
JP2009222689A (ja) * 2008-03-19 2009-10-01 Nuflare Technology Inc 検査装置
JP6861092B2 (ja) * 2017-05-24 2021-04-21 株式会社カネカ 電子部品の外観検査方法及び外観検査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767844A (en) * 1980-10-15 1982-04-24 Nippon Kogaku Kk <Nikon> Surface inspecting device
JPS58120106A (ja) * 1982-01-12 1983-07-16 Hitachi Ltd 半導体ウエハの外観検査装置
JPS5977345A (ja) * 1982-10-27 1984-05-02 Toshiba Corp 表面きず検出方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767844A (en) * 1980-10-15 1982-04-24 Nippon Kogaku Kk <Nikon> Surface inspecting device
JPS58120106A (ja) * 1982-01-12 1983-07-16 Hitachi Ltd 半導体ウエハの外観検査装置
JPS5977345A (ja) * 1982-10-27 1984-05-02 Toshiba Corp 表面きず検出方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009150725A (ja) * 2007-12-19 2009-07-09 Hitachi High-Technologies Corp 欠陥検査装置

Also Published As

Publication number Publication date
JPS6129712A (ja) 1986-02-10

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