JPH0437737Y2 - - Google Patents

Info

Publication number
JPH0437737Y2
JPH0437737Y2 JP1986197217U JP19721786U JPH0437737Y2 JP H0437737 Y2 JPH0437737 Y2 JP H0437737Y2 JP 1986197217 U JP1986197217 U JP 1986197217U JP 19721786 U JP19721786 U JP 19721786U JP H0437737 Y2 JPH0437737 Y2 JP H0437737Y2
Authority
JP
Japan
Prior art keywords
filter
vacuum
robot
transported
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986197217U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63100179U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986197217U priority Critical patent/JPH0437737Y2/ja
Publication of JPS63100179U publication Critical patent/JPS63100179U/ja
Application granted granted Critical
Publication of JPH0437737Y2 publication Critical patent/JPH0437737Y2/ja
Expired legal-status Critical Current

Links

JP1986197217U 1986-12-22 1986-12-22 Expired JPH0437737Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986197217U JPH0437737Y2 (enrdf_load_stackoverflow) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986197217U JPH0437737Y2 (enrdf_load_stackoverflow) 1986-12-22 1986-12-22

Publications (2)

Publication Number Publication Date
JPS63100179U JPS63100179U (enrdf_load_stackoverflow) 1988-06-29
JPH0437737Y2 true JPH0437737Y2 (enrdf_load_stackoverflow) 1992-09-04

Family

ID=31156740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986197217U Expired JPH0437737Y2 (enrdf_load_stackoverflow) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPH0437737Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50136862U (enrdf_load_stackoverflow) * 1974-04-26 1975-11-11
JPS5672691U (enrdf_load_stackoverflow) * 1979-11-09 1981-06-15

Also Published As

Publication number Publication date
JPS63100179U (enrdf_load_stackoverflow) 1988-06-29

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