JPH0436459B2 - - Google Patents

Info

Publication number
JPH0436459B2
JPH0436459B2 JP58157787A JP15778783A JPH0436459B2 JP H0436459 B2 JPH0436459 B2 JP H0436459B2 JP 58157787 A JP58157787 A JP 58157787A JP 15778783 A JP15778783 A JP 15778783A JP H0436459 B2 JPH0436459 B2 JP H0436459B2
Authority
JP
Japan
Prior art keywords
layer
source
active layer
insulating film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58157787A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6050968A (ja
Inventor
Hiroshi Ishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58157787A priority Critical patent/JPS6050968A/ja
Publication of JPS6050968A publication Critical patent/JPS6050968A/ja
Publication of JPH0436459B2 publication Critical patent/JPH0436459B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes
    • H10D30/87—FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP58157787A 1983-08-31 1983-08-31 電界効果トランジスタの製造方法 Granted JPS6050968A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58157787A JPS6050968A (ja) 1983-08-31 1983-08-31 電界効果トランジスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58157787A JPS6050968A (ja) 1983-08-31 1983-08-31 電界効果トランジスタの製造方法

Publications (2)

Publication Number Publication Date
JPS6050968A JPS6050968A (ja) 1985-03-22
JPH0436459B2 true JPH0436459B2 (cs) 1992-06-16

Family

ID=15657281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58157787A Granted JPS6050968A (ja) 1983-08-31 1983-08-31 電界効果トランジスタの製造方法

Country Status (1)

Country Link
JP (1) JPS6050968A (cs)

Also Published As

Publication number Publication date
JPS6050968A (ja) 1985-03-22

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