JPH04361Y2 - - Google Patents

Info

Publication number
JPH04361Y2
JPH04361Y2 JP13921484U JP13921484U JPH04361Y2 JP H04361 Y2 JPH04361 Y2 JP H04361Y2 JP 13921484 U JP13921484 U JP 13921484U JP 13921484 U JP13921484 U JP 13921484U JP H04361 Y2 JPH04361 Y2 JP H04361Y2
Authority
JP
Japan
Prior art keywords
original film
plate
vacuum
film
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13921484U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153752U (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13921484U priority Critical patent/JPH04361Y2/ja
Publication of JPS6153752U publication Critical patent/JPS6153752U/ja
Application granted granted Critical
Publication of JPH04361Y2 publication Critical patent/JPH04361Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP13921484U 1984-09-12 1984-09-12 Expired JPH04361Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13921484U JPH04361Y2 (no) 1984-09-12 1984-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13921484U JPH04361Y2 (no) 1984-09-12 1984-09-12

Publications (2)

Publication Number Publication Date
JPS6153752U JPS6153752U (no) 1986-04-11
JPH04361Y2 true JPH04361Y2 (no) 1992-01-08

Family

ID=30697594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13921484U Expired JPH04361Y2 (no) 1984-09-12 1984-09-12

Country Status (1)

Country Link
JP (1) JPH04361Y2 (no)

Also Published As

Publication number Publication date
JPS6153752U (no) 1986-04-11

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