JPH04354896A - Method for surface treatment and device therefor - Google Patents

Method for surface treatment and device therefor

Info

Publication number
JPH04354896A
JPH04354896A JP12816391A JP12816391A JPH04354896A JP H04354896 A JPH04354896 A JP H04354896A JP 12816391 A JP12816391 A JP 12816391A JP 12816391 A JP12816391 A JP 12816391A JP H04354896 A JPH04354896 A JP H04354896A
Authority
JP
Japan
Prior art keywords
processing
station
standby
workpiece
workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12816391A
Other languages
Japanese (ja)
Other versions
JP2906091B2 (en
Inventor
Hirobumi Hara
博文 原
Satoshi Ishii
聡 石井
Hiroshi Arai
新井 弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Priority to JP12816391A priority Critical patent/JP2906091B2/en
Publication of JPH04354896A publication Critical patent/JPH04354896A/en
Application granted granted Critical
Publication of JP2906091B2 publication Critical patent/JP2906091B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Coating Apparatus (AREA)

Abstract

PURPOSE:To reduce a tact time without being restricted by a treating stage taking a long time even if a batch-tape surface-treating device, in which a work stopped and hung from a hanger is charged into a treating tank as such, is used. CONSTITUTION:Plural treating tanks 4 are set in parallel in a treating station S1 taking a long time, and further, standby stations T1 and T2 are provided before and behind the station S1. When a work is treated in the station S1, a hanger 3 for a work treated in the preceding treating station is moved to the standby station T1 and allowed to stand by. After treatment is completed, the works are discharged from each treating tank 4 in the station S1, plural hangers 3 are simultaneously moved to the standby station T2, the plural hangers 3 in the standby station T1 are moved to the treating station S1, and the succeeding treatment is started.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、自動車車体等のワーク
を自走式ハンガに吊持して搬送する処理ラインに沿って
複数の処理ステーションを設け、各処理ステーションに
配置した処理槽に各ワークをその搬送を停止した状態で
各ハンガに吊持したまま入槽するように構成したバッチ
式の表面処理装置を用いてワークの表面処理を行う方法
及び装置に関する。
[Industrial Application Field] The present invention provides a plurality of processing stations along a processing line in which workpieces such as automobile bodies are suspended and transported on self-propelled hangers, and each processing tank is placed in a processing tank located at each processing station. The present invention relates to a method and apparatus for performing surface treatment on a workpiece using a batch type surface treatment apparatus configured such that the workpiece is loaded into a tank while being suspended from each hanger with the conveyance of the workpiece stopped.

【0002】0002

【従来の技術】バッチ式の表面処理装置では、時間のか
かる処理工程によってライン全体のタクトタイムが決ま
ってしまい、タクトタイムの短縮が困難になる不具合が
ある。かかる不具合を解消するため、処理時間を他の処
理ステーションに比し長く必要とする電着塗装等の処理
ステーションに配置する処理槽を搬送方向に幅広く形成
し、ワークを処理槽に入槽後ハンガの移動でワークを液
中搬送して、このワークの処理時間内に次のワークを処
理槽に入槽し、タクトタイムの短縮を図るようにしたも
のが特開平3−2397号公報により知られている。 又、特開平1−135560号公報により、処理時間が
長くかかる処理ステーションに同一の処理槽を複数個並
設し、各処理槽にワークを入出槽する昇降装置を設ける
と共にハンガを隣接する処理ステーション間で往復動す
るシャトル型に構成し、ワークをハンガから所定の処理
槽の昇降装置に受渡して該処理槽に入槽した後、次のワ
ークを別の処理槽の昇降装置に受渡して該処理槽に入槽
し、複数の処理槽で併行して処理を行い得られるように
してタクトタイムを短縮するものも知られている。
BACKGROUND OF THE INVENTION Batch-type surface treatment apparatuses have a problem in that the takt time of the entire line is determined by the time-consuming processing steps, making it difficult to shorten the takt time. In order to eliminate this problem, the processing tank installed at processing stations such as electrodeposition coating, which requires longer processing time than other processing stations, is made wider in the transport direction, and the workpieces are placed in a hanger after entering the processing tank. Japanese Patent Laid-Open No. 3-2397 discloses a system in which a workpiece is conveyed in a liquid by moving the workpiece, and the next workpiece is placed in the processing tank within the processing time of this workpiece, thereby shortening the takt time. ing. In addition, according to Japanese Patent Application Laid-Open No. 1-135560, a plurality of identical processing tanks are installed in parallel at a processing station where processing time is long, and an elevating device for loading and unloading workpieces is provided in each processing tank, and a hanger is installed at an adjacent processing station. The workpiece is transferred from the hanger to the lifting device of a predetermined processing tank and enters the processing tank, and then the next workpiece is transferred to the lifting device of another processing tank and processed. There is also known a method that shortens takt time by allowing processing to be carried out in parallel in a plurality of processing tanks.

【0003】0003

【発明が解決しようとする課題】上記後者の従来技術で
は、各処理槽に昇降装置を設けてこれとハンガとの間で
ワークの受渡しを行わねばならず、構造が複雑になると
共にワークの受渡しのための制御が複雑になり、ワーク
をハンガに吊持したまま処理槽に入出槽する前者の従来
技術の方がコスト的には有利である。然し、前者の従来
技術の如くワークを液中搬送すると、処理状態の管理が
行いにくくなり、特に電着塗装工程でワークの液中搬送
を行うと、槽内電極を効率良く配置できなくなって、処
理時間の増加や品質低下を招く不具合がある。本発明は
、以上の点に鑑み、ワークをハンガに吊持したまま処理
槽に入出槽し、而もワークを液中搬送することなくタク
トタイムを短縮し得るようにした表面処理方法及び装置
を提供することをその目的としている。
[Problem to be Solved by the Invention] In the latter conventional technique, each processing tank must be provided with an elevating device and the workpieces must be transferred between this device and the hanger, which makes the structure complicated and makes it difficult to transfer the workpieces. The control for this is complicated, and the former conventional technique, in which the workpiece is taken into and out of the processing tank while suspended on a hanger, is more advantageous in terms of cost. However, when the workpiece is transported in liquid as in the former conventional technology, it becomes difficult to control the processing state, and especially when the workpiece is transported in liquid during the electrodeposition coating process, it becomes impossible to efficiently arrange the electrodes in the tank. There are defects that increase processing time and reduce quality. In view of the above points, the present invention provides a surface treatment method and device that allows workpieces to be transported into and out of a processing tank while suspended on hangers, and to shorten takt time without transporting the workpieces in liquid. Its purpose is to provide.

【0004】0004

【課題を解決するための手段】上記目的を達成すべく、
本発明は、ワークを自走式ハンガに吊持して搬送する処
理ラインに沿って複数の処理ステーションを設け、各処
理ステーションに配置した処理槽に各ワークをその搬送
を停止した状態で各ハンガに吊持したまま入槽するよう
に構成したバッチ式の表面処理装置を用いてワークの表
面処理を行う方法において、処理時間を他の処理ステー
ションに比し長く必要とする所定の処理ステーションに
同一の処理槽を複数個並設すると共に、該所定の処理ス
テーションの前後に待機ステーションを設け、該所定の
処理ステーションに前段の待機ステーションから複数の
ワークを同時に搬送して各ワークを該所定の処理ステー
ションの各処理槽に入槽し、所定の処理時間経過後にこ
れらワークを同時に該各処理槽から出槽させて後段の待
機ステーションに搬送し、該後段の待機ステーションか
らワークを1個宛次の処理ステーションに搬送するよう
にしたことを特徴とする。
[Means for solving the problem] In order to achieve the above purpose,
In the present invention, a plurality of processing stations are provided along a processing line in which workpieces are suspended and transported on self-propelled hangers, and each workpiece is placed in a processing tank placed at each processing station while each hanger is suspended from transport. In a method of surface treating workpieces using a batch-type surface treatment device that is configured to enter a tank while being suspended from a tank, certain processing stations require a longer processing time than other processing stations. A plurality of processing tanks are arranged in parallel, and standby stations are provided before and after the predetermined processing station, and a plurality of workpieces are simultaneously transported to the predetermined processing station from the previous standby station, and each workpiece is subjected to the predetermined processing. The workpieces are placed in each processing tank of the station, and after a predetermined processing time has elapsed, these workpieces are simultaneously taken out of each processing tank and transported to the subsequent standby station. It is characterized in that it is transported to a processing station.

【0005】[0005]

【作用】所定の処理ステーションの各処理槽に各ワーク
を入槽して表面処理を行っている間に、該処理ステーシ
ョンの手前の処理時間の短い処理ステーションで処理さ
れたワークが前段の待機ステーションに順次搬送され、
該待機ステーションに複数のワークがストックされる。 そして、所定の処理ステーションでの処理時間が経過し
たとき、該処理ステーションの各処理槽からワークを出
槽させて、これらワークを後段の待機ステーションに搬
送し、同時に前段の待機ステーションにストックされて
いた複数のワークを所定の処理ステーションに搬送して
各処理槽に入槽する。後段の待機ステーションに搬送さ
れた複数のワークは、次の処理ステーションでの先行す
るワークの処理が済む度に1個宛当該次の処理ステーシ
ョンに搬送され、所定の処理ステーションでの処理時間
が経過して該処理ステーションから後段の待機ステーシ
ョンに複数のワークを搬送する際には、該待機ステーシ
ョンに待機していた最後のワークが次の処理ステーショ
ンに搬送され、該待機ステーションが空になって所定の
処理ステーションからのワーク搬送を支障なく行い得ら
れる。このようにして、所定の処理ステーションでの処
理に時間がかかっても、処理時間の短い他の処理ステー
ションでの処理時間に合わせたタクトタイムでワークの
表面処理を行い得られる。尚、後段の待機ステーション
での待機中に、その手前の前記所定の処理ステーション
で用いた処理液がワークに付着したまま乾燥してむらに
なることがあり、そこで当該待機ステーションで待機中
のワークに水を噴霧してワークの乾燥を防止することが
望ましい。
[Operation] While each workpiece is placed in each processing tank of a predetermined processing station and subjected to surface treatment, the workpieces processed at the processing station with a shorter processing time before the processing station are placed in the standby station at the previous stage. are sequentially transported to
A plurality of workpieces are stocked at the standby station. When the processing time at a predetermined processing station has elapsed, the workpieces are taken out from each processing tank of the processing station, and these workpieces are transported to the subsequent standby station, and at the same time, the workpieces stored in the previous standby station are removed. A plurality of workpieces are transported to a predetermined processing station and placed in each processing tank. The multiple workpieces transported to the subsequent standby station are transported one by one to the next processing station each time the preceding workpiece is processed at the next processing station, and the processing time at the predetermined processing station elapses. When a plurality of workpieces are transferred from the processing station to the subsequent standby station, the last workpiece that was waiting at the standby station is transferred to the next processing station, and the standby station is emptied and the predetermined Workpieces can be transported from the processing station without any problems. In this way, even if the processing at a predetermined processing station takes a long time, the surface of the workpiece can be processed in a takt time that matches the processing time at other processing stations where the processing time is shorter. Note that while the workpiece is on standby at the subsequent standby station, the processing liquid used at the previous predetermined processing station may remain attached to the workpiece and dry, causing unevenness. It is desirable to prevent the workpiece from drying out by spraying water on it.

【0006】[0006]

【実施例】図1を参照して、1は処理ライン上に設けた
ハンガコンベアを示し、該コンベア1のコンベアレール
2に沿って自走する各ハンガ3に索条3aを介して自動
車車体等のワークWを昇降自在に吊持させ、処理ライン
に設けた複数の処理ステーションの各々で各ハンガ3を
停止させ、ワークWを各処理ステーションに配置した処
理槽4にハンガー3に吊持したまま入槽するようにした
。図示されている処理ステーションは、電着ステーショ
ンS1と、その後段側に前後5段に設けた水洗ステーシ
ョンS2…S6であり、電着ステーションS1の前段側
には化成処理されたワークを水洗する図示しない処理ス
テーションが設けられている。
[Embodiment] Referring to FIG. 1, reference numeral 1 indicates a hanger conveyor provided on a processing line, and a cable 3a is connected to each hanger 3 of the conveyor 1, which is self-propelled along a conveyor rail 2. The work W is suspended so that it can be raised and lowered freely, each hanger 3 is stopped at each of a plurality of processing stations provided in the processing line, and the work W is suspended from the hanger 3 in a processing tank 4 arranged at each processing station. I decided to enter the tank. The illustrated processing stations are an electrodeposition station S1 and washing stations S2...S6 provided in five stages in front and behind the electrodeposition station S1. No processing stations are provided.

【0007】電着ステーションS1での処理には、各水
洗ステーションS2…S6の処理時間の約3倍程度の時
間がかかり、そこで電着ステーションS1に3個の処理
槽4を並設し、更に電着ステーションS1の前後に夫々
3台のハンガ3を待機可能な待機ステーションT1、T
2を設けた。そして、前段の待機ステーションT1から
3台のハンガ3を同時に電着ステーションS1に移動し
て、該ステーションS1の各処理槽4に該各ハンガ3に
吊持されるワークWを入槽し、電着のための所定の処理
時間が経過したところで各ワークWを各処理槽4から出
槽させて、図2(a)に示すように3台のハンガ3を同
時に後段の待機ステーションT2に移動し、一方、電着
処理中に前段の待機ステーションT1にその前段の処理
ステーションから移動して待機していた3台のハンガ3
を電着ステーションS1に移動して、次の電着処理を開
始する。後段の待機ステーションT2には、3個の空の
槽5が並設されており、各ハンガ3に吊持されるワーク
Wを該各槽5に入槽させ、該待機ステーションT2での
待機中に槽5内でワークWに図示しない噴霧器により水
を噴霧してワークWの乾燥を防止し、電着ステーション
S1での処理時間中に水洗ステーションS2…S6での
タクト送りに合わせてこれらハンガ3を図2(b)(c
)に示すように待機ステーションT2から1台宛水洗ス
テーションに移動する。
[0007] The processing at the electrodeposition station S1 takes approximately three times as long as the processing time at each washing station S2...S6, so three processing tanks 4 are installed in parallel at the electrodeposition station S1, Waiting stations T1 and T where three hangers 3 can be placed on standby before and after the electrodeposition station S1, respectively.
2 was established. Then, the three hangers 3 are simultaneously moved from the previous standby station T1 to the electrodeposition station S1, and the work W suspended by each hanger 3 is placed in each processing tank 4 of the station S1. After the predetermined processing time for the work W has elapsed, each workpiece W is taken out from each processing tank 4, and the three hangers 3 are simultaneously moved to the subsequent standby station T2 as shown in FIG. 2(a). On the other hand, during the electrodeposition process, three hangers 3 that had been moved from the previous processing station to the previous standby station T1 were placed on standby.
is moved to the electrodeposition station S1 to start the next electrodeposition process. Three empty tanks 5 are arranged in parallel at the subsequent standby station T2, and the work W suspended by each hanger 3 is placed in each tank 5 while it is waiting at the standby station T2. The workpieces W are sprayed with water using a sprayer (not shown) in the tank 5 to prevent the workpieces W from drying. Figure 2(b)(c)
), the machine moves from the standby station T2 to the washing station for one machine.

【0008】尚、図示の実施例では、待機ステーション
T2において前位のハンガ3の水洗ステーションS2へ
の移動に合わせて後位のハンガ3を前につめるようにし
たが、後位のハンガ3をそのままの位置で待機させるよ
うにしても良い。又、電着ステーションS1でのワーク
の出槽タイミングと他の処理ステーションでのワークの
出槽タイミングとが合致している場合には、各待機ステ
ーションT1、T2のスペースをハンガ3の2台分のス
ペースに狭め、前段の待機ステーションT1に待機させ
た2台のハンガを電着ステーションS1に移動する際に
、その前段の処理ステーションに居たハンガを待機ステ
ーションT1で停止せずに直接電着ステーションS1に
移動し、一方、電着ステーションS1に居た3台のハン
ガのうち最前位のハンガを後段の待機ステーションT2
で停止せずに、直接水洗ステーションS2に移動し残り
の2台のハンガを後段の待機ステーションT2に移動待
機させるようにしても良い。
In the illustrated embodiment, the rear hanger 3 is packed forward at the standby station T2 as the front hanger 3 is moved to the washing station S2. It may be made to wait in the same position. In addition, if the timing of unloading the workpiece at the electrodeposition station S1 and the timing of unloading the workpiece at another processing station match, the space of each standby station T1 and T2 is divided into two hangers 3. When moving the two hangers that were placed on standby at the previous standby station T1 to the electrodeposition station S1, the hanger that was at the previous processing station is directly electrodeposited without stopping at the standby station T1. Move to station S1, and move the frontmost hanger of the three hangers at electrodeposition station S1 to the subsequent standby station T2.
It is also possible to directly move to the washing station S2 without stopping at , and move the remaining two hangers to the subsequent standby station T2 to stand by.

【0009】[0009]

【発明の効果】以上の説明から明らかなように、請求項
1、3の発明によれば、ワークをその搬送を停止した状
態でハンガーに吊持したまま処理槽に入槽するバッチ式
の表面処理装置を用いることで設備費の削減や品質の安
定化を図れ、且つバッチ式の表面処理装置を用いても処
理に時間のかかる処理工程に制約されることなくタクト
タイムを短縮でき、更に請求項2の発明によれば、後段
の待機ステーションで待機するワークの乾燥を防止して
、ワークに付着残留する処理液に起因した処理むら等の
発生を防止できる効果を有する。
Effects of the Invention As is clear from the above description, according to the inventions of claims 1 and 3, a batch-type surface treatment system in which a workpiece enters a processing tank while being suspended on a hanger with its conveyance stopped. By using processing equipment, you can reduce equipment costs and stabilize quality, and even if you use batch-type surface treatment equipment, you can shorten takt time without being restricted by the time-consuming processing process, and you can also reduce billing costs. According to the invention described in item 2, it is possible to prevent the workpieces waiting at the subsequent standby station from drying out, thereby preventing the occurrence of processing unevenness caused by the processing liquid remaining on the workpieces.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】  本発明措置の一例の側面図[Figure 1] Side view of an example of the measures of the present invention

【図2】  同
図(a)(b)(c)はワークの動きを示す図1に対応
する側面図
[Figure 2] Figures (a), (b), and (c) are side views corresponding to Figure 1 showing the movement of the workpiece.

【符号の説明】[Explanation of symbols]

W  ワーク S1  電着ステーション(所定の処理ステーション)
T1  前段の待機ステーション T2  後段の待機ステーション 3  ハンガ 4  処理槽
W Work S1 Electrodeposition station (predetermined processing station)
T1 Front standby station T2 Back standby station 3 Hanger 4 Processing tank

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】  ワークを自走式ハンガに吊持して搬送
する処理ラインに沿って複数の処理ステーションを設け
、各処理ステーションに配置した処理槽に各ワークをそ
の搬送を停止した状態で各ハンガに吊持したまま入槽す
るように構成したバッチ式の表面処理装置を用いてワー
クの表面処理を行う方法において、処理時間を他の処理
ステーションに比し長く必要とする所定の処理ステーシ
ョンに同一の処理槽を複数個並設すると共に、該所定の
処理ステーションの前後に待機ステーションを設け、該
所定の処理ステーションに前段の待機ステーションから
複数のワークを同時に搬送して各ワークを該所定の処理
ステーションの各処理槽に入槽し、所定の処理時間経過
後にこれらワークを同時に該各処理槽から出槽させて後
段の待機ステーションに搬送し、該後段の待機ステーシ
ョンからワークを1個宛次の処理ステーションに搬送す
るようにしたことを特徴とする表面処理方法。
Claim 1: A plurality of processing stations are provided along a processing line in which workpieces are suspended and transported by self-propelled hangers, and each workpiece is placed in a processing tank placed at each processing station while transport is stopped. In a method of surface treating workpieces using a batch-type surface treatment device that is configured to enter the tank while being suspended from a hanger, a certain processing station that requires longer processing time than other processing stations is used. A plurality of identical processing tanks are installed in parallel, and standby stations are provided before and after the predetermined processing station, and a plurality of workpieces are simultaneously transported to the predetermined processing station from the previous standby station, and each workpiece is transferred to the predetermined processing station. The workpieces are placed in each processing tank of the processing station, and after a predetermined processing time has elapsed, these workpieces are simultaneously taken out of each processing tank and transported to the subsequent standby station, and one workpiece is delivered from the latter standby station. A surface treatment method characterized by transporting the surface to a treatment station.
【請求項2】  後段の待機ステーションで待機中のワ
ークに水を噴霧してワークの乾燥を防止することを特徴
とする請求項1に記載の表面処理方法。
2. The surface treatment method according to claim 1, further comprising spraying water onto the workpiece waiting at a subsequent standby station to prevent the workpiece from drying out.
【請求項3】  ワークを自走式ハンガに吊持して搬送
する処理ラインに沿って複数の処理ステーションを設け
、各処理ステーションに配置した処理槽に各ワークをそ
の搬送を停止した状態で各ハンガに吊持したまま入槽す
るように構成したバッチ式の表面処理装置において、処
理時間を他の処理ステーションに比し長く必要とする所
定の処理ステーションに同一の処理槽を複数個並設する
と共に、該所定の処理ステーションの前後に、該所定の
処理ステーションに設ける処理槽の数より1つ少ない数
以上の台数のハンガを待機可能な待機ステーションを設
けたことを特徴とする表面処理装置。
3. A plurality of processing stations are provided along a processing line in which workpieces are suspended and transported on self-propelled hangers, and each workpiece is placed in a processing tank placed at each processing station while transport is stopped. In a batch-type surface treatment device configured to enter the tank while suspended from a hanger, multiple identical processing tanks are installed in parallel at a given processing station that requires a longer processing time than other processing stations. In addition, a surface treatment apparatus characterized in that a standby station is provided before and after the predetermined processing station, in which a number of hangers at least one less than the number of processing tanks provided in the predetermined processing station can be placed on standby.
JP12816391A 1991-05-31 1991-05-31 Surface treatment method and surface treatment device Expired - Fee Related JP2906091B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12816391A JP2906091B2 (en) 1991-05-31 1991-05-31 Surface treatment method and surface treatment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12816391A JP2906091B2 (en) 1991-05-31 1991-05-31 Surface treatment method and surface treatment device

Publications (2)

Publication Number Publication Date
JPH04354896A true JPH04354896A (en) 1992-12-09
JP2906091B2 JP2906091B2 (en) 1999-06-14

Family

ID=14977951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12816391A Expired - Fee Related JP2906091B2 (en) 1991-05-31 1991-05-31 Surface treatment method and surface treatment device

Country Status (1)

Country Link
JP (1) JP2906091B2 (en)

Also Published As

Publication number Publication date
JP2906091B2 (en) 1999-06-14

Similar Documents

Publication Publication Date Title
EP0980716B1 (en) Coating equipment
JPH04129630A (en) Conveying device
JPH0726396A (en) Electrodeposition coating method
JPH04354896A (en) Method for surface treatment and device therefor
JPS6362599B2 (en)
JP3615877B2 (en) Painting equipment
US2935989A (en) Processing apparatus
US4421130A (en) Corrosion protection pretreating apparatus
JP3615876B2 (en) Painting equipment
JPH10297712A (en) Article storage device
KR102098811B1 (en) Carrier bar transport system and method thereof for mounting a film-coated object
JP2822069B2 (en) Equipment for transporting workpieces in painting equipment
JP3574228B2 (en) Detachable loading device for transport conveyor
JPH06275594A (en) Automatic treatment device
JP3520940B2 (en) Method and apparatus for storing and transporting green tires
JP2004100008A (en) Transporting-treatment apparatus and process for treating subject to be treated
JP3148441B2 (en) Immersion processing equipment
JPH05206092A (en) Method of automatically washing semiconductor wafer
JPH0499893A (en) Emergency refuge method in batch surface-treating line
JPH0414457Y2 (en)
JP2632866B2 (en) Transfer rail in roving transfer system
JPH0694066B2 (en) Production equipment with batch type vacuum heat treatment furnace
JPH02247400A (en) Surface-treating apparatus for component part
JPS6299499A (en) Method for supplying conveying frame to electrolytic surface treatment line and housing device for conveying frame
JPH08127898A (en) Dipping device

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19990202

LAPS Cancellation because of no payment of annual fees