JPH043496Y2 - - Google Patents
Info
- Publication number
- JPH043496Y2 JPH043496Y2 JP16426483U JP16426483U JPH043496Y2 JP H043496 Y2 JPH043496 Y2 JP H043496Y2 JP 16426483 U JP16426483 U JP 16426483U JP 16426483 U JP16426483 U JP 16426483U JP H043496 Y2 JPH043496 Y2 JP H043496Y2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- electrode
- wafer
- electrodes
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 32
- 239000004065 semiconductor Substances 0.000 description 16
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16426483U JPS6073232U (ja) | 1983-10-24 | 1983-10-24 | ウエハロ−デング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16426483U JPS6073232U (ja) | 1983-10-24 | 1983-10-24 | ウエハロ−デング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6073232U JPS6073232U (ja) | 1985-05-23 |
| JPH043496Y2 true JPH043496Y2 (enrdf_load_stackoverflow) | 1992-02-04 |
Family
ID=30360179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16426483U Granted JPS6073232U (ja) | 1983-10-24 | 1983-10-24 | ウエハロ−デング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6073232U (enrdf_load_stackoverflow) |
-
1983
- 1983-10-24 JP JP16426483U patent/JPS6073232U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6073232U (ja) | 1985-05-23 |
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