JPS6142920Y2 - - Google Patents
Info
- Publication number
- JPS6142920Y2 JPS6142920Y2 JP5600883U JP5600883U JPS6142920Y2 JP S6142920 Y2 JPS6142920 Y2 JP S6142920Y2 JP 5600883 U JP5600883 U JP 5600883U JP 5600883 U JP5600883 U JP 5600883U JP S6142920 Y2 JPS6142920 Y2 JP S6142920Y2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- sample substrate
- movable
- vapor deposition
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 42
- 238000005229 chemical vapour deposition Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5600883U JPS59160564U (ja) | 1983-04-14 | 1983-04-14 | 化学気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5600883U JPS59160564U (ja) | 1983-04-14 | 1983-04-14 | 化学気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59160564U JPS59160564U (ja) | 1984-10-27 |
| JPS6142920Y2 true JPS6142920Y2 (enrdf_load_stackoverflow) | 1986-12-05 |
Family
ID=30186333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5600883U Granted JPS59160564U (ja) | 1983-04-14 | 1983-04-14 | 化学気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59160564U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06678B2 (ja) * | 1984-11-28 | 1994-01-05 | 株式会社東芝 | 有機金属熱分解気相結晶成長装置 |
-
1983
- 1983-04-14 JP JP5600883U patent/JPS59160564U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59160564U (ja) | 1984-10-27 |
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