JPH0434920Y2 - - Google Patents
Info
- Publication number
- JPH0434920Y2 JPH0434920Y2 JP18650386U JP18650386U JPH0434920Y2 JP H0434920 Y2 JPH0434920 Y2 JP H0434920Y2 JP 18650386 U JP18650386 U JP 18650386U JP 18650386 U JP18650386 U JP 18650386U JP H0434920 Y2 JPH0434920 Y2 JP H0434920Y2
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- air
- exhaust
- port
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 239000000428 dust Substances 0.000 description 19
- 230000000694 effects Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18650386U JPH0434920Y2 (cs) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18650386U JPH0434920Y2 (cs) | 1986-12-03 | 1986-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6390456U JPS6390456U (cs) | 1988-06-11 |
| JPH0434920Y2 true JPH0434920Y2 (cs) | 1992-08-19 |
Family
ID=31136115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18650386U Expired JPH0434920Y2 (cs) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0434920Y2 (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4575684B2 (ja) * | 2004-03-08 | 2010-11-04 | ジョプラックス株式会社 | 流体ブローガン |
| JP4589667B2 (ja) * | 2004-06-29 | 2010-12-01 | 株式会社ダイゾー | 流体ブローガン |
| JP2014168527A (ja) * | 2013-03-01 | 2014-09-18 | Chori Co Ltd | 低温空気供給装置 |
-
1986
- 1986-12-03 JP JP18650386U patent/JPH0434920Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6390456U (cs) | 1988-06-11 |
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