JPH04336B2 - - Google Patents
Info
- Publication number
- JPH04336B2 JPH04336B2 JP58045062A JP4506283A JPH04336B2 JP H04336 B2 JPH04336 B2 JP H04336B2 JP 58045062 A JP58045062 A JP 58045062A JP 4506283 A JP4506283 A JP 4506283A JP H04336 B2 JPH04336 B2 JP H04336B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- electron beam
- objective lens
- sample
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 33
- 230000005284 excitation Effects 0.000 claims description 23
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000002003 electron diffraction Methods 0.000 description 2
- 238000002524 electron diffraction data Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58045062A JPS59170753A (ja) | 1983-03-17 | 1983-03-17 | 電子線回折装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58045062A JPS59170753A (ja) | 1983-03-17 | 1983-03-17 | 電子線回折装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59170753A JPS59170753A (ja) | 1984-09-27 |
JPH04336B2 true JPH04336B2 (US06262066-20010717-C00315.png) | 1992-01-07 |
Family
ID=12708864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58045062A Granted JPS59170753A (ja) | 1983-03-17 | 1983-03-17 | 電子線回折装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59170753A (US06262066-20010717-C00315.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018221457A1 (ja) | 2017-05-31 | 2018-12-06 | 富士フイルム株式会社 | 感光性樹脂組成物、ポリマー前駆体、硬化膜、積層体、硬化膜の製造方法および半導体デバイス |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51124371A (en) * | 1975-04-23 | 1976-10-29 | Jeol Ltd | Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples |
JPS55128243A (en) * | 1979-03-28 | 1980-10-03 | Hitachi Ltd | Electron microscope |
JPS57212755A (en) * | 1981-06-25 | 1982-12-27 | Internatl Precision Inc | Transmission-type electron microscope |
JPS5825055A (ja) * | 1981-07-16 | 1983-02-15 | Jeol Ltd | 電子顕微鏡 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51138064U (US06262066-20010717-C00315.png) * | 1975-04-28 | 1976-11-08 |
-
1983
- 1983-03-17 JP JP58045062A patent/JPS59170753A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51124371A (en) * | 1975-04-23 | 1976-10-29 | Jeol Ltd | Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples |
JPS55128243A (en) * | 1979-03-28 | 1980-10-03 | Hitachi Ltd | Electron microscope |
JPS57212755A (en) * | 1981-06-25 | 1982-12-27 | Internatl Precision Inc | Transmission-type electron microscope |
JPS5825055A (ja) * | 1981-07-16 | 1983-02-15 | Jeol Ltd | 電子顕微鏡 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018221457A1 (ja) | 2017-05-31 | 2018-12-06 | 富士フイルム株式会社 | 感光性樹脂組成物、ポリマー前駆体、硬化膜、積層体、硬化膜の製造方法および半導体デバイス |
Also Published As
Publication number | Publication date |
---|---|
JPS59170753A (ja) | 1984-09-27 |