JPH0433697B2 - - Google Patents
Info
- Publication number
- JPH0433697B2 JPH0433697B2 JP4334087A JP4334087A JPH0433697B2 JP H0433697 B2 JPH0433697 B2 JP H0433697B2 JP 4334087 A JP4334087 A JP 4334087A JP 4334087 A JP4334087 A JP 4334087A JP H0433697 B2 JPH0433697 B2 JP H0433697B2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- workpiece
- pad
- hole
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000002699 waste material Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 241000269851 Sarda sarda Species 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Registering Or Overturning Sheets (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4334087A JPS63208459A (ja) | 1987-02-25 | 1987-02-25 | 吸着テ−ブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4334087A JPS63208459A (ja) | 1987-02-25 | 1987-02-25 | 吸着テ−ブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63208459A JPS63208459A (ja) | 1988-08-29 |
| JPH0433697B2 true JPH0433697B2 (cg-RX-API-DMAC7.html) | 1992-06-03 |
Family
ID=12661115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4334087A Granted JPS63208459A (ja) | 1987-02-25 | 1987-02-25 | 吸着テ−ブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63208459A (cg-RX-API-DMAC7.html) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2521543B2 (ja) * | 1989-11-28 | 1996-08-07 | 古河工業株式会社 | 紙類の移送装置 |
| US6264185B1 (en) | 2000-04-19 | 2001-07-24 | Shoda Iron Works Co., Ltd. | Suction pad |
| JP4851095B2 (ja) * | 2005-01-11 | 2012-01-11 | 株式会社岡本工作機械製作所 | 非磁性体製ワ−ク用治具 |
| US7584947B2 (en) | 2005-05-20 | 2009-09-08 | The Boeing Company | Reconfigurable workpiece support fixture |
| JP2011253841A (ja) * | 2010-05-31 | 2011-12-15 | Sumco Corp | ウェーハ保持具 |
-
1987
- 1987-02-25 JP JP4334087A patent/JPS63208459A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63208459A (ja) | 1988-08-29 |
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