JPS63208459A - 吸着テ−ブル - Google Patents

吸着テ−ブル

Info

Publication number
JPS63208459A
JPS63208459A JP4334087A JP4334087A JPS63208459A JP S63208459 A JPS63208459 A JP S63208459A JP 4334087 A JP4334087 A JP 4334087A JP 4334087 A JP4334087 A JP 4334087A JP S63208459 A JPS63208459 A JP S63208459A
Authority
JP
Japan
Prior art keywords
suction
workpiece
attraction
pad
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4334087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0433697B2 (cg-RX-API-DMAC7.html
Inventor
Sosuke Miyazaki
宮崎　荘介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHIYOUDA TEKKO KK
Original Assignee
SHIYOUDA TEKKO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHIYOUDA TEKKO KK filed Critical SHIYOUDA TEKKO KK
Priority to JP4334087A priority Critical patent/JPS63208459A/ja
Publication of JPS63208459A publication Critical patent/JPS63208459A/ja
Publication of JPH0433697B2 publication Critical patent/JPH0433697B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
  • Jigs For Machine Tools (AREA)
JP4334087A 1987-02-25 1987-02-25 吸着テ−ブル Granted JPS63208459A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4334087A JPS63208459A (ja) 1987-02-25 1987-02-25 吸着テ−ブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4334087A JPS63208459A (ja) 1987-02-25 1987-02-25 吸着テ−ブル

Publications (2)

Publication Number Publication Date
JPS63208459A true JPS63208459A (ja) 1988-08-29
JPH0433697B2 JPH0433697B2 (cg-RX-API-DMAC7.html) 1992-06-03

Family

ID=12661115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4334087A Granted JPS63208459A (ja) 1987-02-25 1987-02-25 吸着テ−ブル

Country Status (1)

Country Link
JP (1) JPS63208459A (cg-RX-API-DMAC7.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03172240A (ja) * 1989-11-28 1991-07-25 Furukawa Kogyo Kk 紙類の移送装置
US6264185B1 (en) 2000-04-19 2001-07-24 Shoda Iron Works Co., Ltd. Suction pad
JP2006192508A (ja) * 2005-01-11 2006-07-27 Okamoto Machine Tool Works Ltd 非磁性体製ワ−ク用治具
US7584947B2 (en) * 2005-05-20 2009-09-08 The Boeing Company Reconfigurable workpiece support fixture
JP2011253841A (ja) * 2010-05-31 2011-12-15 Sumco Corp ウェーハ保持具

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03172240A (ja) * 1989-11-28 1991-07-25 Furukawa Kogyo Kk 紙類の移送装置
US6264185B1 (en) 2000-04-19 2001-07-24 Shoda Iron Works Co., Ltd. Suction pad
JP2006192508A (ja) * 2005-01-11 2006-07-27 Okamoto Machine Tool Works Ltd 非磁性体製ワ−ク用治具
US7584947B2 (en) * 2005-05-20 2009-09-08 The Boeing Company Reconfigurable workpiece support fixture
US8006968B2 (en) 2005-05-20 2011-08-30 The Boeing Company Reconfigurable workpiece support fixture
JP2011253841A (ja) * 2010-05-31 2011-12-15 Sumco Corp ウェーハ保持具

Also Published As

Publication number Publication date
JPH0433697B2 (cg-RX-API-DMAC7.html) 1992-06-03

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