JPH0433697B2 - - Google Patents
Info
- Publication number
- JPH0433697B2 JPH0433697B2 JP4334087A JP4334087A JPH0433697B2 JP H0433697 B2 JPH0433697 B2 JP H0433697B2 JP 4334087 A JP4334087 A JP 4334087A JP 4334087 A JP4334087 A JP 4334087A JP H0433697 B2 JPH0433697 B2 JP H0433697B2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- workpiece
- pad
- hole
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000002699 waste material Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 241000269851 Sarda sarda Species 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Registering Or Overturning Sheets (AREA)
Description
【発明の詳細な説明】
<産業上の利用分野>
本発明は、吸着テーブルの改良に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to an improvement of a suction table.
<従来の技術とその問題点>
従来の吸着テーブルアは、第10図に示すよう
にテーブルアの上部に真空室イを設け、その上に
捨て板ウを置く。捨て板ウには、加工材Wに対応
する部分に吸引孔エをあけ、真空室イに生ずる吸
引力により加工材Wの底面に吸着力を作用させて
吸引固定する。このため、捨て板ウは加工材Wの
形状が異る毎に、その形状に対応するものを準備
しなければならない欠点がある。<Prior art and its problems> In a conventional suction table, as shown in FIG. 10, a vacuum chamber A is provided in the upper part of the table, and a waste plate C is placed on top of the vacuum chamber A. A suction hole E is formed in the waste board C in a portion corresponding to the workpiece W, and suction force generated in the vacuum chamber A acts on the bottom surface of the workpiece W to suction and fix the workpiece W. For this reason, each time the shape of the workpiece W differs, the waste board U must be prepared in a manner corresponding to that shape.
また、加工材Wを直接捨て板ウ上におくので、
カツタオの形状いかんによつては、加工材Wの下
方にまでカツタオが及ぶため、捨て板ウにまで切
り込んで、捨て板ウを傷付ける欠点があつた。 Also, since the processed material W is placed directly on the waste board U,
Depending on the shape of the bonito, the bonito extends to the bottom of the workpiece W, which has the disadvantage of cutting into the waste board and damaging the waste board.
<問題点を解決するための手段>
本発明は、上記の欠点を解消した吸着テーブル
を提供しようとするもので、つぎのように構成す
る。<Means for Solving the Problems> The present invention aims to provide a suction table that eliminates the above-mentioned drawbacks, and is configured as follows.
すなわち厚さ方向に多数の吸引孔をあけた基板
を吸着テーブルの真空室上に固定し、吸引孔のう
ち吸引力を必要としない部分の吸引孔には閉じ蓋
を嵌合して閉じ、吸引力を必要とする部分の吸引
孔には吸着パツトを挿入立設し、この吸着パツト
上に加工材を載置して吸引固定することを特徴と
する吸着テーブルである。 In other words, a substrate with a large number of suction holes drilled in the thickness direction is fixed on the vacuum chamber of a suction table, and the suction holes that do not require suction force are closed by fitting lids, and the suction holes are closed. This suction table is characterized in that a suction pad is inserted and erected into a suction hole in a portion that requires force, and a workpiece is placed on the suction pad and fixed by suction.
<作用>
吸引孔に吸着パツトと閉じ蓋とを適宜に挿入す
ることにより、吸着力が働く部分と働かない部分
とを任意に設けうる。このため、加工材の形状に
応じて吸着パツトを挿入立設することにより、基
板そのものをかえなくても、加工材の形状に対応
する部分にのみ吸引力を作用させ、他の部分には
作用させないようにすることができる。<Function> By appropriately inserting the suction pad and the closing lid into the suction hole, it is possible to arbitrarily provide a portion where the suction force works and a portion where the suction force does not work. Therefore, by inserting and erecting suction pads according to the shape of the workpiece, the suction force can be applied only to the part corresponding to the shape of the workpiece, and not to other parts, without changing the board itself. You can prevent this from happening.
<実施例>
以下に本発明の実施例を図面に基いて説明す
る。第1〜2図に示す図面において1は吸着テー
ブル2の真空室3(この部分は第9図参照)上に
固定する基板で、厚さ方向に多数の吸引孔4を縦
横格子状にあける。吸引孔4は、大径部51(直
径:28mm)と小径部52(直径:20mm)とよりな
る断面段状の立孔で、各孔の中心間ピツチは44mm
とする。ただし、これらの数値は一例で、これに
限るものではない。<Example> Examples of the present invention will be described below based on the drawings. In the drawings shown in FIGS. 1 and 2, reference numeral 1 denotes a substrate fixed onto a vacuum chamber 3 (see FIG. 9 for this part) of a suction table 2, and a large number of suction holes 4 are formed in a vertical and horizontal lattice pattern in the thickness direction. The suction hole 4 is a vertical hole with a stepped cross section consisting of a large diameter part 51 (diameter: 28 mm) and a small diameter part 52 (diameter: 20 mm), and the center-to-center pitch of each hole is 44 mm.
shall be. However, these numbers are just examples and are not limited to these.
吸引孔4のうち、加工材Wを載置して吸引固定
する部分には、吸着パツトを挿入立設する。6は
吸着パツトの第1実施例で、第3図に示すように
下端に小径部7を有す外周段状の筒状体で、下半
部を第8〜9図に示すように吸引孔4内に挿入し
て立設する。上端縁にはエアもれ防止用のウレタ
ンリング8を貼着する。内部には上下を開口端と
した内部空間9を設け、その下端は吸着テーブル
2の真空室3へ連通させ、上端は吸着面とする。
なお第7〜8図に示す91は吸着パツト6の抜け
止めで、隣接する4本へ吸着パツト6間にかため
に押し込み、中央のビス孔へ基板1へ通ずるビス
92を通して固定する。 A suction pad is inserted and erected in a portion of the suction hole 4 where the workpiece W is placed and fixed by suction. Reference numeral 6 designates a first embodiment of a suction pad, which is a cylindrical body with a step-shaped outer circumference having a small diameter portion 7 at the lower end as shown in FIG. 3, and a suction hole in the lower half as shown in FIGS. 4 and set it upright. A urethane ring 8 for preventing air leakage is attached to the upper edge. An internal space 9 with open ends at the top and bottom is provided inside, the lower end of which communicates with the vacuum chamber 3 of the suction table 2, and the upper end serving as a suction surface.
Reference numeral 91 shown in FIGS. 7 and 8 is for preventing the suction pads 6 from coming off. Push the suction pads 6 firmly between the four adjacent suction pads 6, and fix them by passing the screw 92 leading to the substrate 1 into the center screw hole.
10は吸着パツトの第2実施例で、第4〜5図
に示すように4本の吸引孔4にわたる吸着室11
を設け、その下に各吸引孔4へ挿入する挿入端1
2を設け、その下開口端と吸着室11間に連通孔
121を設けたものである。この吸着パツト10
は、吸着室11が第1実施例に比して大きいた
め、第1実施例の吸着パツト6より大きな吸引力
が生ずる。 Reference numeral 10 designates a second embodiment of the suction pad, which has a suction chamber 11 extending over four suction holes 4 as shown in FIGS.
An insertion end 1 is provided below which is inserted into each suction hole 4.
2 is provided, and a communication hole 121 is provided between the lower open end and the adsorption chamber 11. This suction pad 10
Since the suction chamber 11 is larger than that of the first embodiment, a larger suction force is generated than that of the suction pad 6 of the first embodiment.
13は加工材Wの横ずれ防止用のスパイクピン
台で、第6図に示すように上端の突出部14にネ
ジ孔15を設け、ここにスパイクピン16をねじ
込む。このスパイクピン16の突端を第9図に示
すように加工材Wの底面に刺入して、加工材Wの
横ずれを防ぐ。 Reference numeral 13 denotes a spike pin stand for preventing lateral displacement of the workpiece W, and as shown in FIG. 6, a screw hole 15 is provided in the projection 14 at the upper end, into which a spike pin 16 is screwed. The tip of this spike pin 16 is inserted into the bottom surface of the workpiece W as shown in FIG. 9 to prevent the workpiece W from shifting laterally.
17は吸引力を必要としない部分の吸引孔4を
ふさぐ閉じ蓋で、第4図右側に示すように吸引孔
4の大径部51に嵌入して、これを閉口する。下
面にはエアもれ防止用のウレタン18を貼着す
る。第7〜8図に示す19は閉じ蓋17の押え板
で、まわり4枚の閉じ蓋17の一端を上から押
え、中心のビス孔へ基板1へ通ずるビス20を通
して固定する。 Reference numeral 17 denotes a closing lid that closes off the suction hole 4 in a portion that does not require suction force, and is inserted into the large diameter portion 51 of the suction hole 4 to close it, as shown on the right side of FIG. Urethane 18 is attached to the bottom surface to prevent air leakage. Reference numeral 19 shown in FIGS. 7 and 8 is a holding plate for the closing lid 17, which presses one end of the four surrounding closing lids 17 from above, and fixes it by passing a screw 20 leading to the substrate 1 into the center screw hole.
つぎに本装置の使い方を説明する。まず吸引力
を必要とする部分主として加工材Wを載置する部
分の吸引孔4に吸着パツト6を挿入立設し、吸着
力を必要としない部分主として加工材Wが及ばな
い部分の吸引孔4には閉じ蓋19を嵌入して閉じ
る。(第9図参照)大きな吸引力を必要とする部
分には、第2実施例として示した吸着パツト11
を挿入立設する。(第4図参照)さすれば各吸着
パツト6の内部空間9もしくは吸着パツト11の
吸着室11は吸着テーブル2の真空室3に通ず
る。そこで、吸着テーブル2を稼動して真空室3
を真空状態とすれば、加工材Wの下面に吸引力が
働いて、これを吸引固定する。 Next, we will explain how to use this device. First, the suction pad 6 is inserted and erected into the suction hole 4 of the part where the workpiece W is placed, mainly the part that requires suction force, and the suction hole 4 of the part that does not require suction power is mainly the part where the workpiece W does not reach. The closing lid 19 is inserted and closed. (See Fig. 9) For parts that require a large suction force, use the suction pad 11 shown in the second embodiment.
Insert and set up. (See FIG. 4) Then, the internal space 9 of each suction pad 6 or the suction chamber 11 of the suction pad 11 communicates with the vacuum chamber 3 of the suction table 2. Therefore, by operating the suction table 2, the vacuum chamber 3
When the workpiece W is brought into a vacuum state, a suction force acts on the lower surface of the workpiece W to suction and fix it.
また、切削抵抗が大きくて加工材Wが横ずれす
る虞れがあるところは、スパイクピン台15を吸
引孔4に挿入立設して、スパイクピン18の尖端
を加工材Wの底面に刺入し、これを固定して横ず
れを防ぐ。(第9図参照)
<発明の効果>
本発明は、吸着テーブル上に固定する基板の吸
引孔に吸着パツトと閉じ蓋とを任意に挿入立設す
るよう構成したため、つぎの効果が生ずる。 In addition, in places where there is a risk of the workpiece W slipping laterally due to large cutting resistance, insert the spike pin stand 15 into the suction hole 4 and insert the tip of the spike pin 18 into the bottom surface of the workpiece W. , fix this to prevent lateral slippage. (See FIG. 9) <Effects of the Invention> Since the present invention is configured such that the suction pad and the closing lid are inserted and erected arbitrarily into the suction hole of the substrate fixed on the suction table, the following effects occur.
(1) 基板上に吸引部分と非吸引部分とを自由に設
けうるため、主として加工材の形状に応じて吸
引部分と非吸引部分とが簡単に得られる。この
ため、従来の捨て板のように加工材の形状がか
わる度に、これに対応するものを準備しなくて
も、一枚の基板で各種形状の加工材に対応で
き、きわめて効率的且つコストダウンが図れ
る。(1) Since the suction portion and the non-suction portion can be freely provided on the substrate, the suction portion and the non-suction portion can be easily obtained mainly depending on the shape of the workpiece. Therefore, unlike conventional scrap boards, there is no need to prepare a corresponding one each time the shape of the processed material changes, and it is possible to handle various shapes of processed materials with a single board, making it extremely efficient and cost-effective. You can aim for down.
(2) 加工材を吸着パツト上に載置するため、カツ
タが加工材の下方にまで及ぶ形状のものであつ
ても、基板を傷付ける虞れが全くない。(2) Since the workpiece is placed on the suction pad, there is no risk of damaging the substrate even if the cutter extends below the workpiece.
(3) 吸着パツトの形状をかえて吸着室が大きいも
のを使えば、吸着テーブルの吸引力は変わらな
くても、大きな吸引力が得られる。(3) By changing the shape of the suction pad and using one with a larger suction chamber, a large suction force can be obtained even though the suction force of the suction table remains the same.
第1図は基板を示す平面図、第2図は同正面
図、第3図は第1実施例の吸着パツトを示す縦断
正面図、第4図は第2実施例の吸着パツトと閉じ
蓋の使用状態を示す縦断面図、第5図は同平面
図、第6図はスパイクピン台を示す縦断正面図、
第7図は吸着パツトと閉じ蓋と抜け止めの使用状
態を示す平面図、第8図は第7図におけるA−A
縦断面図、第9図は吸着パツト、スパイクピン
台、閉じ蓋の使用状態を示す縦断面図、第10図
は従来の吸着テーブル、捨て板、加工材を示す縦
断面図である。
W……加工材、1……基板、2……吸着テーブ
ル、3……真空室、4……吸引孔、6……吸着パ
ツト、9……内部空間、10……吸着パツト、1
1……吸着室、12……挿入端、17……閉じ
蓋。
Fig. 1 is a plan view showing the substrate, Fig. 2 is a front view thereof, Fig. 3 is a longitudinal sectional front view showing the suction pad of the first embodiment, and Fig. 4 is a view of the suction pad and closing lid of the second embodiment. A longitudinal sectional view showing the state of use, FIG. 5 is a plan view of the same, and FIG. 6 is a longitudinal sectional front view showing the spike pin stand.
Figure 7 is a plan view showing how the suction pad, closing lid, and retainer are used, and Figure 8 is A-A in Figure 7.
FIG. 9 is a vertical cross-sectional view showing how the suction pad, spike pin stand, and closing lid are used, and FIG. 10 is a vertical cross-sectional view showing the conventional suction table, waste plate, and processed material. W... Processing material, 1... Substrate, 2... Suction table, 3... Vacuum chamber, 4... Suction hole, 6... Suction pad, 9... Internal space, 10... Suction pad, 1
1... Adsorption chamber, 12... Insertion end, 17... Closed lid.
Claims (1)
テーブルの真空室上に固定し、吸引孔のうち吸引
力を必要としない部分の吸引孔には閉じ蓋を嵌合
して閉じ、吸引力を必要とする部分の吸引孔には
吸着パツトを挿入立設し、この吸着パツト上に加
工材を載置して吸引固定することを特徴とする吸
着テーブル。 2 吸着パツトとして、上下端を開口端とした内
部空間を有する筒状体を吸引孔に挿入立設する特
許請求の範囲第1項記載の吸着テーブル。 3 吸着パツトとして、複数の吸引孔へわたる吸
着室を設け、該吸着室の下部へ各吸引孔へ挿入す
る挿入端を設けてなる特許請求の範囲第1項記載
の吸着テーブル。[Claims] 1. A substrate with a large number of suction holes drilled in the thickness direction is fixed on a vacuum chamber of a suction table, and a closed lid is fitted to the suction holes that do not require suction force. The suction table is characterized in that a suction pad is inserted and erected into a suction hole in a portion that requires suction force, and a workpiece is placed on the suction pad and fixed by suction. 2. The suction table according to claim 1, wherein a cylindrical body having an internal space with upper and lower ends as open ends is inserted into the suction hole and erected as the suction pad. 3. The suction table according to claim 1, wherein the suction pad is provided with a suction chamber extending over a plurality of suction holes, and an insertion end is provided at the lower part of the suction chamber to be inserted into each suction hole.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4334087A JPS63208459A (en) | 1987-02-25 | 1987-02-25 | Sucking table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4334087A JPS63208459A (en) | 1987-02-25 | 1987-02-25 | Sucking table |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63208459A JPS63208459A (en) | 1988-08-29 |
JPH0433697B2 true JPH0433697B2 (en) | 1992-06-03 |
Family
ID=12661115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4334087A Granted JPS63208459A (en) | 1987-02-25 | 1987-02-25 | Sucking table |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63208459A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2521543B2 (en) * | 1989-11-28 | 1996-08-07 | 古河工業株式会社 | Paper transport device |
US6264185B1 (en) | 2000-04-19 | 2001-07-24 | Shoda Iron Works Co., Ltd. | Suction pad |
JP4851095B2 (en) * | 2005-01-11 | 2012-01-11 | 株式会社岡本工作機械製作所 | Non-magnetic work jig |
US7584947B2 (en) | 2005-05-20 | 2009-09-08 | The Boeing Company | Reconfigurable workpiece support fixture |
JP2011253841A (en) * | 2010-05-31 | 2011-12-15 | Sumco Corp | Wafer holder |
-
1987
- 1987-02-25 JP JP4334087A patent/JPS63208459A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS63208459A (en) | 1988-08-29 |
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