JPH0432392B2 - - Google Patents
Info
- Publication number
- JPH0432392B2 JPH0432392B2 JP11981889A JP11981889A JPH0432392B2 JP H0432392 B2 JPH0432392 B2 JP H0432392B2 JP 11981889 A JP11981889 A JP 11981889A JP 11981889 A JP11981889 A JP 11981889A JP H0432392 B2 JPH0432392 B2 JP H0432392B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- phase
- wave
- reference wave
- moire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 31
- 230000008859 change Effects 0.000 claims description 24
- 238000005286 illumination Methods 0.000 claims description 24
- 238000003384 imaging method Methods 0.000 claims description 23
- 239000002245 particle Substances 0.000 claims description 8
- 230000010354 integration Effects 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 17
- 238000010586 diagram Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 8
- 230000010363 phase shift Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Holo Graphy (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11981889A JPH02298983A (ja) | 1989-05-12 | 1989-05-12 | 電子線または荷電粒子線を用いた２光束イメージホログラムの実時間再生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11981889A JPH02298983A (ja) | 1989-05-12 | 1989-05-12 | 電子線または荷電粒子線を用いた２光束イメージホログラムの実時間再生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02298983A JPH02298983A (ja) | 1990-12-11 |
| JPH0432392B2 true JPH0432392B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-05-29 |
Family
ID=14771007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11981889A Granted JPH02298983A (ja) | 1989-05-12 | 1989-05-12 | 電子線または荷電粒子線を用いた２光束イメージホログラムの実時間再生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02298983A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5420678B2 (ja) * | 2009-12-11 | 2014-02-19 | 株式会社日立製作所 | 電子線バイプリズム装置および電子線装置 |
| US8946628B2 (en) * | 2012-02-03 | 2015-02-03 | Hitachi, Ltd. | Electron beam interference device and electron beam interferometry |
-
1989
- 1989-05-12 JP JP11981889A patent/JPH02298983A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02298983A (ja) | 1990-12-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |