JPH04322029A - Impregnated type cathode and manufacture thereof - Google Patents

Impregnated type cathode and manufacture thereof

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Publication number
JPH04322029A
JPH04322029A JP3088605A JP8860591A JPH04322029A JP H04322029 A JPH04322029 A JP H04322029A JP 3088605 A JP3088605 A JP 3088605A JP 8860591 A JP8860591 A JP 8860591A JP H04322029 A JPH04322029 A JP H04322029A
Authority
JP
Japan
Prior art keywords
cathode
pellet
sleeve
melting point
impregnated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3088605A
Other languages
Japanese (ja)
Inventor
Misao Izeki
操 井関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Japan Radio Co Ltd
Original Assignee
New Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Japan Radio Co Ltd filed Critical New Japan Radio Co Ltd
Priority to JP3088605A priority Critical patent/JPH04322029A/en
Publication of JPH04322029A publication Critical patent/JPH04322029A/en
Pending legal-status Critical Current

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  • Solid Thermionic Cathode (AREA)

Abstract

PURPOSE:To achieve uniform fixation and provide a uniform temperature at a surface of a cathode by brazing a cathode pellet and a cathode sleeve to each other via a metal material having a high melting point deposited on the back surface and side surface of the cathode pellet. CONSTITUTION:A metal material having a high melting point is deposited on the back surface and side surface of a cathode base by a sputtering method, thus obtaining a coated layer 3. A blazing material 4 is applied onto the coated layer 3 deposited on a cathode pellet 1, to be engaged with a cathode sleeve 2, followed by brazing. Because the surface of the coated layer 3 becomes wet when the blazing material 4 applied onto the back surface of the pellet 1 is molten, it is completely coated with the blazing material. After fixing of the cathode base to the cathode sleeve 2, an electron radioactive material is applied to the surface of the cathode base, followed by a heat treatment in a hydrogen furnace. Consequently, the electron radioactive material is impregnated in pores of the pellet 1, and the residual electron radioactive material is removed, thus producing the pellet 1. Furthermore, since the pellet 1 and the sleeve 2 are brazed to each other, it is possible to achieve uniform fixation, enhance thermal conduction, provide a uniform temperature at the whole surface of a cathode, and enhance an electric characteristic.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は陰極線管、マイクロ波管
などに用いられる含浸型陰極およびその製法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an impregnated cathode used in cathode ray tubes, microwave tubes, etc., and a method for manufacturing the same.

【0002】0002

【従来の技術】従来、電子逆衝撃やイオン衝撃の強いマ
グネトロンや使用条件の過酷な陰極線管などに用いられ
る陰極に含浸型陰極が用いられている。この従来の含浸
型陰極の一例の構造は図3に示すような構造になってい
る。すなわち同図において、1は陰極ペレットでたとえ
ばタングステン粉末を主成分とする高融点金属粉末を焼
結して所定の形状に形成した陰極基体に、酸化バリウム
、酸化カルシウム、酸化アルミニウムなどの混合物より
なる電子放射性物質を溶融含浸して形成したものである
。2は陰極スリーブで、陰極ペレット1を支持固着する
と共に、内部に加熱用のヒータ5を収納するもので使用
時の高温に耐えうると共に溶接し易いタリウムなどで形
成してある。6はモリブデンなどの高融点金属板で形成
したキャップで、陰極ペレット1および陰極スリーブ2
とそれぞれ溶接することにより陰極ペレット1と陰極ス
リーブ2とを固着している。
BACKGROUND OF THE INVENTION Hitherto, impregnated cathodes have been used for cathodes used in magnetrons, which are subjected to strong electron reverse impact and ion impact, and cathode ray tubes, which are subject to harsh usage conditions. An example of the structure of this conventional impregnated cathode is as shown in FIG. That is, in the same figure, 1 is a cathode pellet, which is made of a mixture of barium oxide, calcium oxide, aluminum oxide, etc., and is attached to a cathode base formed into a predetermined shape by sintering high-melting point metal powder mainly composed of tungsten powder. It is formed by melting and impregnating an electron radioactive material. A cathode sleeve 2 supports and fixes the cathode pellet 1 and houses a heater 5 therein, and is made of thallium or the like, which can withstand high temperatures during use and is easy to weld. 6 is a cap made of a high-melting point metal plate such as molybdenum, which is used to connect the cathode pellet 1 and the cathode sleeve 2.
The cathode pellet 1 and the cathode sleeve 2 are fixed by welding.

【0003】このキャップ6は陰極ペレット1の裏面か
らヒータ側に電子放射性物質の飛散が行われるのを防止
するために介在させている。すなわち陰極ペレット1は
周囲全面から電子放射性物質が侵出し、ヒータ5側に電
子放射性物質が飛散すると陰極ペレット1とヒータ5と
の間の電気的絶縁が低下し特性劣化をきたすと共に、電
子放射性物質の量が減少して寿命を短かくするためであ
る。
[0003] This cap 6 is interposed to prevent electron radioactive material from scattering from the back surface of the cathode pellet 1 to the heater side. In other words, the electron radioactive material leaks out from the entire surrounding area of the cathode pellet 1, and when the electron radioactive material scatters to the heater 5 side, the electrical insulation between the cathode pellet 1 and the heater 5 decreases, causing characteristic deterioration, and the electron radioactive material This is because the amount of carbon dioxide decreases and the lifespan is shortened.

【0004】この電子放射性物質の飛散を防止するため
に、キャップ6を使用しないで、陰極ペレット1の裏面
および側面にロウ材を被着して表面の空孔部分(高融点
金属粉末焼結による空隙部分)を封じると共に、そのロ
ウ材を利用して陰極スリーブ2に直接ロウづけする方法
も考えられている。このばあい、ロウづけ温度が非常に
高い(約2000℃)ため、電子放射性物質を劣化させ
ないよう陰極スリーブとロウづけ後に陰極基体の多孔質
内に電子放射性物質を含浸させる。
In order to prevent this electron radioactive material from scattering, the cap 6 is not used, and the back and side surfaces of the cathode pellet 1 are coated with a brazing material to fill the voids on the surface (made by sintering high melting point metal powder). A method has also been considered in which the cathode sleeve 2 is directly brazed using the brazing material while sealing the gap (gap portion). In this case, since the brazing temperature is very high (approximately 2000° C.), the electron emissive material is impregnated into the porosity of the cathode base after brazing the cathode sleeve to prevent the electron emissive material from deteriorating.

【0005】[0005]

【発明が解決しようとする課題】しかし、従来のキャッ
プ6を介して陰極ペレット1と陰極スリーブ2とをそれ
ぞれ溶接で固着する方法では、これらの材料がいずれも
高融点金属であるため、溶接が確実に行えず、陰極温度
が陰極ペレットの位置により異なったり、また動作中に
陰極スリーブ2から陰極ペレット1が剥離脱落して、電
気特性上、信頼性上の問題があった。また溶接作業自体
も条件が厳しく作業効率が非常に悪かった。
[Problems to be Solved by the Invention] However, in the conventional method of fixing the cathode pellet 1 and the cathode sleeve 2 through the cap 6 by welding, welding is difficult because these materials are both high-melting point metals. This could not be done reliably, the cathode temperature would vary depending on the position of the cathode pellet, and the cathode pellet 1 would peel off from the cathode sleeve 2 during operation, causing problems in terms of electrical characteristics and reliability. Furthermore, the conditions for the welding work itself were severe and work efficiency was extremely low.

【0006】一方、従来のロウづけする方法では、ロウ
流れの良いロウ材(たとえばMo−RuまたはMo−N
i )を使用すると、陰極基体の空孔内にロウ材が流れ
込み、陰極ペレット1内に含浸させる電子放射性物質の
量が大幅に減少して寿命を大幅に低下させる反面、ロウ
流れの悪いロウ材(たとえばMo2 B )を使用する
とロウづけ後のロウ材表面にピンホールが無数にできて
、遮弊効果を果しえなく実用化されていない。
On the other hand, in the conventional brazing method, a brazing material with good solder flow (for example, Mo-Ru or Mo-N) is used.
i), the brazing material flows into the pores of the cathode substrate, significantly reducing the amount of electron radioactive substance impregnated into the cathode pellet 1, and significantly shortening the service life. When using (for example, Mo2B), countless pinholes are formed on the surface of the brazing material after brazing, and the shielding effect cannot be achieved, so it has not been put to practical use.

【0007】[0007]

【課題を解決するための手段】本発明は、上記課題を解
決するため、陰極ペレットの裏面および側面に形成した
高融点金属材料の被着層を介してロウづけにより陰極ペ
レットと陰極スリーブとを固着したことにある。
[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention aims to connect a cathode pellet and a cathode sleeve by brazing through an adhesion layer of a high melting point metal material formed on the back and side surfaces of the cathode pellet. It's because it's stuck.

【0008】本発明の他の手段は陰極基体の気孔率に応
じて被着層の適切な厚さを設定したもので、具体的には
気孔率が18〜20%のばあいには被着層の厚さを5〜
7μm に、気孔率が20〜25%のばあいには被着層
の厚さを7〜10μm に設定したことにある。
Another means of the present invention is to set an appropriate thickness of the adhesion layer according to the porosity of the cathode substrate. Specifically, when the porosity is 18 to 20%, the adhesion layer is Layer thickness 5~
When the porosity is 20 to 25%, the thickness of the adhered layer is set to 7 to 10 μm.

【0009】本発明のさらに他の手段は陰極基体を形成
する工程と、該陰極基体の裏面および側面に高融点金属
材料の被着層を形成する工程と、前記陰極ペレットと陰
極スリーブをロウづけする工程と、電子放射性物質を含
浸させる工程と、ヒータを配設する工程との結合により
含浸型陰極を製造することにある。
Still another means of the present invention includes a step of forming a cathode substrate, a step of forming an adhesion layer of a high melting point metal material on the back and side surfaces of the cathode substrate, and brazing the cathode pellet and the cathode sleeve. The purpose of the present invention is to manufacture an impregnated cathode by combining a step of impregnating an electron emitting substance, a step of impregnating an electron emitting substance, and a step of disposing a heater.

【0010】0010

【作用】本発明によれば、陰極ペレットと陰極スリーブ
とを高融点金属材料の被着層を介してロウづけにより固
着しているため、被着層が遮弊体となり、陰極基体の空
孔内にロウ材が流れ込むことなく、しかも陰極ペレット
と陰極スリーブとを確実に、しかも均一に固着できる。 更に陰極基体の空孔内へのロウ流れの恐れがないため、
ロウ流れの良いロウ材を使用でき、ロウづけ後のロウ材
にピンホールは発生せずロウ材が完全な遮弊体として作
用し、電子放射性物質の飛散を完全に防止する。
[Function] According to the present invention, since the cathode pellet and the cathode sleeve are fixed by brazing through the adhesion layer of a high-melting point metal material, the adhesion layer acts as a barrier and pores in the cathode base. In addition, the cathode pellets and the cathode sleeve can be firmly and uniformly fixed without the brazing material flowing into the cathode sleeve. Furthermore, there is no risk of wax flowing into the pores of the cathode substrate.
A brazing material with good solder flow can be used, no pinholes are generated in the brazing material after brazing, and the brazing material acts as a complete barrier, completely preventing scattering of electron radioactive substances.

【0011】[0011]

【実施例】図1は本発明の一実施例による含浸型陰極の
断面図を示す。同図で、3はタングステン、モリブデン
、イリジウム、レニウムなどの高融点金属材料の被着層
、4はたとえばモリブデン− ルテニウム合金などのロ
ウ材で、他の符号は図3のばあいと同じである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a cross-sectional view of an impregnated cathode according to an embodiment of the present invention. In the figure, 3 is an adhesion layer of a high melting point metal material such as tungsten, molybdenum, iridium, or rhenium, 4 is a brazing material such as a molybdenum-ruthenium alloy, and other symbols are the same as in FIG. 3. .

【0012】この含浸型陰極の製法を説明すると、まず
、たとえば粒径が2〜10μm のタングステン粉末を
主体とする高融点金属粉末をプレス成形して還元性雰囲
気中で陰極ペレット形状に陰極基体を形成する。この陰
極基体の形成は予め陰極ペレットの形状にプレス成形し
て焼結しても良いが、厳密な寸法、形状を必要とするば
あいは、任意形状のプレス成形体に無酸素銅やプラスチ
ックを含浸させて、機械加工により陰極ペレットの形状
に加工し、そののち真空炉などで無酸素銅やプラスチッ
クを除去して形成してもよい。
[0012] To explain the manufacturing method of this impregnated cathode, first, a high melting point metal powder mainly composed of tungsten powder with a particle size of 2 to 10 μm is press-molded, and a cathode substrate is formed into a cathode pellet shape in a reducing atmosphere. Form. The cathode substrate can be formed by press-molding it into the shape of a cathode pellet in advance and sintering it, but if exact dimensions and shape are required, oxygen-free copper or plastic can be used to form a press-formed body of any shape. It may also be formed by impregnating it, machining it into the shape of a cathode pellet, and then removing the oxygen-free copper or plastic in a vacuum furnace or the like.

【0013】この陰極基体の裏面と側面に、スパッタ法
やCVD 法によりタングステン、モリブデン、イリジ
ウム、レニウムなどの高融点金属材料を被着し、被着層
3を形成する。この被着層3を形成するスパッタ法の一
例を図2により説明する。
A high-melting point metal material such as tungsten, molybdenum, iridium, or rhenium is deposited on the back and side surfaces of the cathode substrate by sputtering or CVD to form a deposition layer 3. An example of a sputtering method for forming this adhesion layer 3 will be explained with reference to FIG.

【0014】図2において、7は陰極基体でその表面(
陰極ペレットの電子を放射する面)を治具8に接して固
着し、治具8は正の電極9に接続する。10は他方の負
の電極で、ターゲット11を支持しており、この実施例
ではターゲットとしてタングステン材料を使用している
。 12は例えばアルゴンの不活性ガス雰囲気で、13は高
周波電圧を印加する電源である。この装置により高周波
の高電圧を印加するとアルゴンガスは非常に高エネルギ
ーをもった陽イオンAr+ に電離し、これが電極の負
側すなわちターゲット11のタングステンに飛び込み、
タングステンがAr+ のもっていた高エネルギーをえ
て飛び出し、陰極基体7の露出面(すなわち陰極ペレッ
トになったばあいの裏面と側面)に被着する。その被着
層の厚さは高電圧の印加時間にほぼ比例し、自由に調整
できる。
In FIG. 2, 7 is a cathode substrate whose surface (
The electron emitting surface of the cathode pellet is fixed in contact with a jig 8, and the jig 8 is connected to a positive electrode 9. The other negative electrode 10 supports a target 11, and in this embodiment, tungsten material is used as the target. 12 is an inert gas atmosphere such as argon, and 13 is a power source for applying a high frequency voltage. When a high frequency and high voltage is applied by this device, the argon gas is ionized into positive ions Ar+ with extremely high energy, which jump into the negative side of the electrode, that is, the tungsten of the target 11.
Tungsten gains the high energy of Ar+ and flies out, and adheres to the exposed surface of the cathode substrate 7 (that is, the back and side surfaces of the cathode pellet). The thickness of the deposited layer is approximately proportional to the high voltage application time and can be freely adjusted.

【0015】ターゲット11から飛び出たタングステン
は微粒子となって陽極側に到達し陰極基体7の露出面に
被着するため、陰極基体7の空孔部分の露出面積が大き
い程空孔部分を完全に遮弊するのに厚い被着層を必要と
する。空孔部分の露出面積の割合は気孔率(陰極基体全
体の空孔部分の体積に対する陰極基体全体の体積の割合
)にほぼ比例し、実験の結果、気孔率が18〜20%の
陰極基体に対しては5〜7μm の被着厚、気孔率が2
0〜25%のばあいには7〜10μm の被着厚にすれ
ば、充分ロウ材の侵入を防止できることが判明した。
Since the tungsten ejected from the target 11 becomes fine particles and reaches the anode side and adheres to the exposed surface of the cathode substrate 7, the larger the exposed area of the pores in the cathode substrate 7, the more completely the pores are completely covered. Requires a thick adhesion layer to provide protection. The ratio of the exposed area of the pores is approximately proportional to the porosity (the ratio of the volume of the entire cathode substrate to the volume of the pores of the entire cathode substrate), and as a result of experiments, it was found that a cathode substrate with a porosity of 18 to 20% On the other hand, the coating thickness is 5 to 7 μm and the porosity is 2.
It has been found that in the case of 0 to 25%, a coating thickness of 7 to 10 .mu.m can sufficiently prevent the intrusion of the brazing material.

【0016】CVD 法により被着層を形成する場合は
、通常のCVD 法と同様に、反応管内に陰極基体を配
設してたとえば4フッ化タングステンガスを導入して熱
分解することにより、陰極基体の露出部分にタングステ
ン材料が被着し、被着層を形成することができる。
When forming an adhesion layer by the CVD method, the cathode is formed by disposing a cathode substrate in a reaction tube and thermally decomposing it by introducing tungsten tetrafluoride gas, as in the usual CVD method. A tungsten material can be deposited on the exposed portion of the substrate to form a deposited layer.

【0017】この被着層3を形成した陰極ペレット7の
被着層上に、モリブデン− ルテニウム合金ロウ材を塗
布し、モリブデン− レニウム合金で形成した陰極スリ
ーブ2をはめ合せて水素炉でロウづけを行う。このロウ
づけの際、陰極ペレット7の裏面は陰極スリーブ2と接
していないが、付着したロウ材が一旦溶融して被着層3
の表面に濡れるため裏面もロウ材で完全に被覆される。 陰極スリーブの材質としては、溶接の必要はなくロウ流
れの良い耐熱性のあるモリブデン− レニウム合金が好
適である。
A molybdenum-ruthenium alloy brazing material is applied onto the adhesion layer of the cathode pellets 7 on which the adhesion layer 3 has been formed, and a cathode sleeve 2 made of a molybdenum-rhenium alloy is fitted and brazed in a hydrogen furnace. I do. During this brazing, the back surface of the cathode pellet 7 is not in contact with the cathode sleeve 2, but the attached brazing material is once melted and the adhesion layer 3
Since the surface of the solder is wetted, the back side is also completely covered with wax. A suitable material for the cathode sleeve is a heat-resistant molybdenum-rhenium alloy that does not require welding and has good solder flow.

【0018】この陰極基体7と陰極スリーブ2の固着後
陰極基体7の表面に酸化バリウム、酸化カルシウム、酸
化アルミニウムなどを所定割合に混合した電子放射性物
質を塗布して水素炉などで熱処理し、陰極ペレットの空
孔部に電子放射性物質を含浸させ、表面に残った余分な
電子放射性物質を除去することにより陰極ペレット1を
形成する。
After the cathode base 7 and the cathode sleeve 2 are fixed together, an electron radioactive material containing a mixture of barium oxide, calcium oxide, aluminum oxide, etc. in a predetermined ratio is coated on the surface of the cathode base 7, and heat-treated in a hydrogen furnace or the like to form a cathode. The cathode pellet 1 is formed by impregnating the pores of the pellet with an electron radioactive substance and removing the excess electron radioactive substance remaining on the surface.

【0019】この陰極ペレット1と陰極スリーブ2を固
着したものの内部にアルミナなどで絶縁したヒータ5を
配置し、電子管内の所定の位置に溶接などで固着するこ
とにより陰極部を形成することができる。
A cathode portion can be formed by placing a heater 5 insulated with alumina or the like inside the cathode pellet 1 and cathode sleeve 2 fixed together, and fixing it at a predetermined position within the electron tube by welding or the like. .

【0020】[0020]

【発明の効果】本発明によれば、陰極ペレットと陰極ス
リーブとをロウづけにより固着しているため均一に固着
でき、熱伝導も向上して陰極表面全体も均一温度となり
、電気特性も向上する。しかもロウづけ作業は容易で一
度に大量のロウづけを行うこともでき、従来の溶接に比
べて作業能率が大幅に向上し、安価に製造することがで
きる。
[Effects of the Invention] According to the present invention, since the cathode pellet and the cathode sleeve are fixed by brazing, they can be fixed uniformly, heat conduction is improved, the entire cathode surface has a uniform temperature, and electrical characteristics are also improved. . Moreover, the brazing work is easy and a large amount of brazing can be performed at one time, and work efficiency is greatly improved compared to conventional welding, and it can be manufactured at a low cost.

【0021】一方陰極基体の裏面および側面には高融点
金属材料による被着層を形成しているため、陰極基体の
空孔部分へのロウ材侵入は全然なく、含浸する電子放射
性物質の量は従来のキャップ使用のものに劣ることなく
、固着強度の向上に伴い寿命および信頼性が大幅に向上
する効果がある。更に被着層の表面を緻密なロウ材で被
覆しているため、電子放射性物質のヒータ側への飛散も
完全に防止でき、陰極ヒータ間の絶縁低下なども一切生
じない。
On the other hand, since an adhesion layer made of a high melting point metal material is formed on the back and side surfaces of the cathode substrate, there is no penetration of the brazing material into the pores of the cathode substrate, and the amount of the electron radioactive substance impregnated is small. It is not inferior to conventional caps, and has the effect of significantly improving lifespan and reliability due to improved fixation strength. Furthermore, since the surface of the adhesion layer is coated with a dense brazing material, it is possible to completely prevent electron radioactive substances from scattering toward the heater side, and there is no deterioration in the insulation between the cathode heaters.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の一実施例である含浸型陰極の縦断面図
である。
FIG. 1 is a longitudinal cross-sectional view of an impregnated cathode that is an embodiment of the present invention.

【図2】本発明の一工程例であるスパッタ装置の概略断
面図である。
FIG. 2 is a schematic cross-sectional view of a sputtering apparatus that is a step example of the present invention.

【図3】従来の含浸型陰極の一例の縦断面図である。FIG. 3 is a longitudinal cross-sectional view of an example of a conventional impregnated cathode.

【符号の説明】[Explanation of symbols]

1  陰極ペレット 2  陰極スリーブ 3  被着層 4  ロウ材 5  ヒータ 7  陰極基体 8  治具 9  正電極 10  負電極 11  ターゲット 12  アルゴンガス雰囲気 13  電源 1 Cathode pellet 2 Cathode sleeve 3 Adhesive layer 4. Waxing material 5 Heater 7 Cathode substrate 8 Jig 9 Positive electrode 10 Negative electrode 11 Target 12 Argon gas atmosphere 13 Power supply

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】  高融点金属粉末を主成分として焼結し
た高融点金属多孔質体からなる陰極基体にバリウムを主
成分とする電子放射性物質が含浸せられた陰極ペレット
と、該陰極ペレットが支持固着せられると共に内部にヒ
ータが収納せられた陰極スリーブと、該陰極スリーブ内
に配設せられたヒータとからなる含浸型陰極であって、
前記陰極ペレットと前記陰極スリーブとが該陰極ペレッ
トの裏面および側面に被着せられた高融点金属材料の被
着層を介してロウづけにより固着せられてなる含浸型陰
極。
Claim 1: A cathode pellet in which a cathode substrate made of a sintered high-melting point metal porous body containing high-melting point metal powder as a main component is impregnated with an electron-emitting substance containing barium as a main component, and the cathode pellet is supported. An impregnated cathode comprising a cathode sleeve that is fixed and has a heater housed therein, and a heater disposed inside the cathode sleeve,
An impregnated cathode in which the cathode pellet and the cathode sleeve are fixed to each other by brazing through an adhesion layer of a high melting point metal material applied to the back and side surfaces of the cathode pellet.
【請求項2】  請求項1記載の含浸型陰極であって、
前記高融点金属多孔質体の気孔率が18〜20%、該被
着層の厚さが5〜7μm とせられてなる含浸型陰極。
2. The impregnated cathode according to claim 1, comprising:
An impregnated cathode, wherein the high melting point metal porous body has a porosity of 18 to 20%, and the adhered layer has a thickness of 5 to 7 μm.
【請求項3】  請求項1記載の含浸型陰極であって、
前記高融点金属多孔質体の気孔率が20〜25%、前記
被着層の厚さが7〜10μm とせられてなる含浸型陰
極。
3. The impregnated cathode according to claim 1,
An impregnated cathode, wherein the high melting point metal porous body has a porosity of 20 to 25%, and the adhered layer has a thickness of 7 to 10 μm.
【請求項4】  高融点金属粉末を主成分とする粉末を
焼結して陰極基体を形成する工程と、該陰極基体の裏面
および側面に高融点金属材料を被着する工程と、前記陰
極基体と陰極スリーブとをロウづけする工程と、前記陰
極基体に電子放射性物質を含浸させる工程と、前記陰極
スリーブ内にヒータを配設する工程との結合からなる含
浸型陰極の製法。
4. A step of forming a cathode substrate by sintering a powder mainly composed of a high-melting point metal powder, a step of depositing a high-melting point metal material on the back and side surfaces of the cathode substrate, and A method for producing an impregnated cathode comprising the following steps: brazing a cathode sleeve and a cathode sleeve; impregnating the cathode base with an electron radioactive substance; and arranging a heater within the cathode sleeve.
JP3088605A 1991-04-19 1991-04-19 Impregnated type cathode and manufacture thereof Pending JPH04322029A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3088605A JPH04322029A (en) 1991-04-19 1991-04-19 Impregnated type cathode and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3088605A JPH04322029A (en) 1991-04-19 1991-04-19 Impregnated type cathode and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH04322029A true JPH04322029A (en) 1992-11-12

Family

ID=13947452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3088605A Pending JPH04322029A (en) 1991-04-19 1991-04-19 Impregnated type cathode and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH04322029A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798758A1 (en) * 1996-03-28 1997-10-01 THOMSON TUBES & DISPLAYS S.A. Method of fabricating or impregnated cathode for a cathode ray tube
KR20010066847A (en) * 1999-12-27 2001-07-11 추후제출 Cathode structure, method of producing the same, and cathode ray tube using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798758A1 (en) * 1996-03-28 1997-10-01 THOMSON TUBES & DISPLAYS S.A. Method of fabricating or impregnated cathode for a cathode ray tube
KR20010066847A (en) * 1999-12-27 2001-07-11 추후제출 Cathode structure, method of producing the same, and cathode ray tube using the same

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