JPH0431818B2 - - Google Patents
Info
- Publication number
- JPH0431818B2 JPH0431818B2 JP19059084A JP19059084A JPH0431818B2 JP H0431818 B2 JPH0431818 B2 JP H0431818B2 JP 19059084 A JP19059084 A JP 19059084A JP 19059084 A JP19059084 A JP 19059084A JP H0431818 B2 JPH0431818 B2 JP H0431818B2
- Authority
- JP
- Japan
- Prior art keywords
- wear
- groove
- grindstone
- amount
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003754 machining Methods 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 31
- 235000012431 wafers Nutrition 0.000 description 67
- 239000004065 semiconductor Substances 0.000 description 57
- 238000010586 diagram Methods 0.000 description 8
- 238000005299 abrasion Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 230000001186 cumulative effect Effects 0.000 description 5
- 230000007812 deficiency Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000006060 molten glass Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59190590A JPS6171968A (ja) | 1984-09-13 | 1984-09-13 | 回転砥石の摩耗補償方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59190590A JPS6171968A (ja) | 1984-09-13 | 1984-09-13 | 回転砥石の摩耗補償方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6171968A JPS6171968A (ja) | 1986-04-12 |
| JPH0431818B2 true JPH0431818B2 (enrdf_load_stackoverflow) | 1992-05-27 |
Family
ID=16260596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59190590A Granted JPS6171968A (ja) | 1984-09-13 | 1984-09-13 | 回転砥石の摩耗補償方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6171968A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0572396U (ja) * | 1992-03-12 | 1993-10-05 | 株式会社テクニスコ | 切り込み深さ過多防止機構 |
| DE10148595A1 (de) | 2001-10-02 | 2003-04-10 | Weber Maschb Gmbh & Co Kg | Vorrichtung zum Aufschneiden von Lebensmittelprodukten |
| JP5633006B2 (ja) * | 2010-03-24 | 2014-12-03 | 公立大学法人大阪府立大学 | 摩擦攪拌加工装置及び摩擦攪拌加工方法 |
| JP6068209B2 (ja) * | 2013-03-12 | 2017-01-25 | 株式会社ディスコ | 切削方法 |
| JP7566505B2 (ja) * | 2020-06-26 | 2024-10-15 | 株式会社ディスコ | 切削装置 |
-
1984
- 1984-09-13 JP JP59190590A patent/JPS6171968A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6171968A (ja) | 1986-04-12 |
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