JPH0429588Y2 - - Google Patents
Info
- Publication number
- JPH0429588Y2 JPH0429588Y2 JP1987189965U JP18996587U JPH0429588Y2 JP H0429588 Y2 JPH0429588 Y2 JP H0429588Y2 JP 1987189965 U JP1987189965 U JP 1987189965U JP 18996587 U JP18996587 U JP 18996587U JP H0429588 Y2 JPH0429588 Y2 JP H0429588Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- firing
- plate
- straightening
- ceramic substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 47
- 238000010304 firing Methods 0.000 claims description 17
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 description 26
- 238000000034 method Methods 0.000 description 6
- 239000006061 abrasive grain Substances 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000007788 roughening Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002751 molybdenum Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987189965U JPH0429588Y2 (US20090163788A1-20090625-C00002.png) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987189965U JPH0429588Y2 (US20090163788A1-20090625-C00002.png) | 1987-12-16 | 1987-12-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0193763U JPH0193763U (US20090163788A1-20090625-C00002.png) | 1989-06-20 |
JPH0429588Y2 true JPH0429588Y2 (US20090163788A1-20090625-C00002.png) | 1992-07-17 |
Family
ID=31480971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987189965U Expired JPH0429588Y2 (US20090163788A1-20090625-C00002.png) | 1987-12-16 | 1987-12-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0429588Y2 (US20090163788A1-20090625-C00002.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018148163A (ja) * | 2017-03-09 | 2018-09-20 | 日本特殊陶業株式会社 | 半導体製造装置用部品の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6016998B2 (ja) * | 1976-07-12 | 1985-04-30 | 三井東圧化学株式会社 | 耐候性の改良されたマスキングフイルム |
JPS62119155A (ja) * | 1985-11-20 | 1987-05-30 | 鳴海製陶株式会社 | 低温焼成セラミツクス基板の焼成方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6016998U (ja) * | 1984-06-13 | 1985-02-05 | 株式会社東芝 | セラミツク焼成用治具 |
-
1987
- 1987-12-16 JP JP1987189965U patent/JPH0429588Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6016998B2 (ja) * | 1976-07-12 | 1985-04-30 | 三井東圧化学株式会社 | 耐候性の改良されたマスキングフイルム |
JPS62119155A (ja) * | 1985-11-20 | 1987-05-30 | 鳴海製陶株式会社 | 低温焼成セラミツクス基板の焼成方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0193763U (US20090163788A1-20090625-C00002.png) | 1989-06-20 |