JPH0429477B2 - - Google Patents
Info
- Publication number
- JPH0429477B2 JPH0429477B2 JP61162455A JP16245586A JPH0429477B2 JP H0429477 B2 JPH0429477 B2 JP H0429477B2 JP 61162455 A JP61162455 A JP 61162455A JP 16245586 A JP16245586 A JP 16245586A JP H0429477 B2 JPH0429477 B2 JP H0429477B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- processing
- laser
- distance measuring
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 21
- 238000006073 displacement reaction Methods 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000000694 effects Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61162455A JPS6316892A (ja) | 1986-07-10 | 1986-07-10 | レ−ザ加工装置用測距装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61162455A JPS6316892A (ja) | 1986-07-10 | 1986-07-10 | レ−ザ加工装置用測距装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6316892A JPS6316892A (ja) | 1988-01-23 |
JPH0429477B2 true JPH0429477B2 (fr) | 1992-05-19 |
Family
ID=15754940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61162455A Granted JPS6316892A (ja) | 1986-07-10 | 1986-07-10 | レ−ザ加工装置用測距装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6316892A (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2660929B2 (ja) * | 1989-04-19 | 1997-10-08 | ファナック株式会社 | Ccd固体撮像素子を用いたアークセンサ |
JPH0385408A (ja) * | 1989-08-30 | 1991-04-10 | Sumitomo Metal Ind Ltd | レーザ距離計による測定方法 |
JPH0447883U (fr) * | 1990-08-30 | 1992-04-23 | ||
JP2008032524A (ja) * | 2006-07-28 | 2008-02-14 | National Institute Of Advanced Industrial & Technology | レーザ加工装置および計測用レーザ光の焦点検出方法 |
DE102007036556A1 (de) * | 2007-08-03 | 2009-02-05 | Siemens Ag | Verfahren zur Überwachung der Fokuslage bei Laserstrahlbearbeitungsprozessen |
US20210220944A1 (en) * | 2018-02-09 | 2021-07-22 | Laserax Inc. | Method for laser-processing a surface and laser processing system |
WO2024095352A1 (fr) * | 2022-10-31 | 2024-05-10 | ファナック株式会社 | Système de mesure et procédé de mesure |
-
1986
- 1986-07-10 JP JP61162455A patent/JPS6316892A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6316892A (ja) | 1988-01-23 |
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