JPH0429402Y2 - - Google Patents
Info
- Publication number
- JPH0429402Y2 JPH0429402Y2 JP1984044445U JP4444584U JPH0429402Y2 JP H0429402 Y2 JPH0429402 Y2 JP H0429402Y2 JP 1984044445 U JP1984044445 U JP 1984044445U JP 4444584 U JP4444584 U JP 4444584U JP H0429402 Y2 JPH0429402 Y2 JP H0429402Y2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- chamber
- ray source
- analysis
- main pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 19
- 229910052782 aluminium Inorganic materials 0.000 claims description 19
- 239000011888 foil Substances 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000007666 vacuum forming Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4444584U JPS60156445U (ja) | 1984-03-27 | 1984-03-27 | Ｘ線光電子分光装置用の排気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4444584U JPS60156445U (ja) | 1984-03-27 | 1984-03-27 | Ｘ線光電子分光装置用の排気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60156445U JPS60156445U (ja) | 1985-10-18 |
| JPH0429402Y2 true JPH0429402Y2 (cs) | 1992-07-16 |
Family
ID=30557022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4444584U Granted JPS60156445U (ja) | 1984-03-27 | 1984-03-27 | Ｘ線光電子分光装置用の排気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60156445U (cs) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6219969Y2 (cs) * | 1977-02-28 | 1987-05-21 |
-
1984
- 1984-03-27 JP JP4444584U patent/JPS60156445U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60156445U (ja) | 1985-10-18 |
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