JPH0429156U - - Google Patents

Info

Publication number
JPH0429156U
JPH0429156U JP7098190U JP7098190U JPH0429156U JP H0429156 U JPH0429156 U JP H0429156U JP 7098190 U JP7098190 U JP 7098190U JP 7098190 U JP7098190 U JP 7098190U JP H0429156 U JPH0429156 U JP H0429156U
Authority
JP
Japan
Prior art keywords
electron
electron beam
detection aperture
emitted
suppression electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7098190U
Other languages
English (en)
Japanese (ja)
Other versions
JP2501075Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990070981U priority Critical patent/JP2501075Y2/ja
Publication of JPH0429156U publication Critical patent/JPH0429156U/ja
Application granted granted Critical
Publication of JP2501075Y2 publication Critical patent/JP2501075Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1990070981U 1990-07-03 1990-07-03 電子顕微鏡等における電子ビ―ム検出器 Expired - Lifetime JP2501075Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990070981U JP2501075Y2 (ja) 1990-07-03 1990-07-03 電子顕微鏡等における電子ビ―ム検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990070981U JP2501075Y2 (ja) 1990-07-03 1990-07-03 電子顕微鏡等における電子ビ―ム検出器

Publications (2)

Publication Number Publication Date
JPH0429156U true JPH0429156U (US07655688-20100202-C00086.png) 1992-03-09
JP2501075Y2 JP2501075Y2 (ja) 1996-06-12

Family

ID=31607612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990070981U Expired - Lifetime JP2501075Y2 (ja) 1990-07-03 1990-07-03 電子顕微鏡等における電子ビ―ム検出器

Country Status (1)

Country Link
JP (1) JP2501075Y2 (US07655688-20100202-C00086.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358769A (en) * 1976-11-08 1978-05-26 Fujitsu Ltd Ion injector
JPS5878356A (ja) * 1981-11-04 1983-05-11 Hitachi Ltd 走査形電子顕微鏡

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358769A (en) * 1976-11-08 1978-05-26 Fujitsu Ltd Ion injector
JPS5878356A (ja) * 1981-11-04 1983-05-11 Hitachi Ltd 走査形電子顕微鏡

Also Published As

Publication number Publication date
JP2501075Y2 (ja) 1996-06-12

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