JPH04282445A - 熱比解析を使用する製品欠陥検出方法及び装置 - Google Patents
熱比解析を使用する製品欠陥検出方法及び装置Info
- Publication number
- JPH04282445A JPH04282445A JP3192930A JP19293091A JPH04282445A JP H04282445 A JPH04282445 A JP H04282445A JP 3192930 A JP3192930 A JP 3192930A JP 19293091 A JP19293091 A JP 19293091A JP H04282445 A JPH04282445 A JP H04282445A
- Authority
- JP
- Japan
- Prior art keywords
- record
- sample
- reference sample
- creating
- difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 title claims abstract description 106
- 238000000034 method Methods 0.000 title claims abstract description 59
- 238000004458 analytical method Methods 0.000 title abstract description 17
- 239000000523 sample Substances 0.000 claims abstract description 121
- 239000013074 reference sample Substances 0.000 claims abstract description 89
- 238000012360 testing method Methods 0.000 claims abstract description 89
- 239000002131 composite material Substances 0.000 claims abstract description 23
- 238000001514 detection method Methods 0.000 claims description 38
- 230000008859 change Effects 0.000 claims description 20
- 238000001757 thermogravimetry curve Methods 0.000 claims description 15
- 230000006641 stabilisation Effects 0.000 claims description 12
- 238000011105 stabilization Methods 0.000 claims description 12
- 230000002950 deficient Effects 0.000 claims description 10
- 230000000638 stimulation Effects 0.000 claims description 7
- 230000001939 inductive effect Effects 0.000 claims description 6
- 230000000630 rising effect Effects 0.000 claims description 5
- 230000001965 increasing effect Effects 0.000 claims description 4
- 238000007781 pre-processing Methods 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 claims 7
- 230000002708 enhancing effect Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 20
- 230000000694 effects Effects 0.000 description 10
- 238000001931 thermography Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 9
- 238000001914 filtration Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 238000007619 statistical method Methods 0.000 description 5
- 239000004615 ingredient Substances 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000002076 thermal analysis method Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000003491 array Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000013139 quantization Methods 0.000 description 2
- 238000000528 statistical test Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 241000473391 Archosargus rhomboidalis Species 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 230000005457 Black-body radiation Effects 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000002405 diagnostic procedure Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000007849 functional defect Effects 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/72—Investigating presence of flaws
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/582,102 US5032727A (en) | 1990-09-14 | 1990-09-14 | Product defect detection using thermal ratio analysis |
| US582102 | 1990-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04282445A true JPH04282445A (ja) | 1992-10-07 |
Family
ID=24327854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3192930A Pending JPH04282445A (ja) | 1990-09-14 | 1991-08-01 | 熱比解析を使用する製品欠陥検出方法及び装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5032727A (enExample) |
| EP (1) | EP0475570A2 (enExample) |
| JP (1) | JPH04282445A (enExample) |
| AU (1) | AU626146B2 (enExample) |
| CA (1) | CA2047426A1 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009109511A (ja) * | 2001-05-21 | 2009-05-21 | Pressco Technology Inc | 自動化されたプロセス制御物品検査アプリケーションの中でスナップショット動作熱赤外線イメージングを提供するための装置および方法 |
| JP2015529336A (ja) * | 2012-09-21 | 2015-10-05 | 杭州美盛紅外光電技術有限公司 | 熱画像診断装置および熱画像診断方法 |
| JP2015534060A (ja) * | 2012-09-19 | 2015-11-26 | センサス スペクトラム エルエルシー | 電気メータの故障を予防する方法および装置 |
Families Citing this family (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03182185A (ja) * | 1989-12-11 | 1991-08-08 | Fujitsu Ltd | 赤外線監視システム |
| US5032727A (en) * | 1990-09-14 | 1991-07-16 | Digital Equipment Corporation | Product defect detection using thermal ratio analysis |
| US5294198A (en) * | 1991-10-01 | 1994-03-15 | Cincinnati Electronics Corporation | Infrared inspection system and method employing emissivity indications |
| US5504431A (en) * | 1991-12-09 | 1996-04-02 | Matsushita Electric Industrial Co., Ltd. | Device for and method of evaluating semiconductor integrated circuit |
| GB2264779B (en) * | 1992-02-20 | 1996-05-01 | Thermoteknix Systems Ltd | Monitoring changes in image characteristics |
| US5417494A (en) * | 1992-05-01 | 1995-05-23 | Exid, Inc. | Contactless testing of electronic materials and devices using microwaves |
| US5240329A (en) * | 1992-08-14 | 1993-08-31 | Ford Motor Company | Non-destructive method for detecting defects in a workpiece |
| US5292195A (en) * | 1992-09-09 | 1994-03-08 | Martin Marietta Corporation | Thermographic evaluation technique |
| NL9301568A (nl) * | 1993-09-09 | 1995-04-03 | Tce Consultancy & Eng | Analyse-systeem voor het analyseren, bewaken, diagnostiseren en/of sturen van een produktieproces waarin produkten worden gevormd die een temperatuurbehandeling ondergaan, produktieproces met een analysesysteem en een werkwijze daarvoor. |
| JPH07128151A (ja) * | 1993-10-29 | 1995-05-19 | Mitsubishi Electric Corp | 熱画像解析装置 |
| GB9421493D0 (en) * | 1994-10-24 | 1994-12-07 | Marconi Gec Ltd | Imaging method and system |
| GB9503274D0 (en) * | 1995-02-21 | 1995-04-12 | Sun Electric Uk Ltd | Method and apparatus for machine diagnosis |
| US5709469A (en) * | 1995-03-13 | 1998-01-20 | The United States Of America As Represented By The Secretary Of The Air Force | Process for testing integrity of bonds between epoxy patches and aircraft structural materials |
| US5833365A (en) * | 1995-03-24 | 1998-11-10 | Interuniversitair Micro-Electronika Centrum Vzw | Method for local temperature sensing for use in performing high resolution in-situ parameter measurements |
| US5631465A (en) * | 1996-02-29 | 1997-05-20 | Shepard; Steven M. | Method of interpreting thermographic data for non-destructive evaluation |
| US5775806A (en) * | 1996-09-12 | 1998-07-07 | The United States Of America As Represented By The Secretary Of The Air Force | Infrared assessment system |
| US6536944B1 (en) * | 1996-10-09 | 2003-03-25 | Symyx Technologies, Inc. | Parallel screen for rapid thermal characterization of materials |
| US5711603A (en) * | 1996-10-30 | 1998-01-27 | United Technologies Corporation | Nondestructive testing: transient depth thermography |
| US6033107A (en) * | 1997-07-15 | 2000-03-07 | Temptronic Corporation | Temperature mapping system |
| US6013915A (en) | 1998-02-10 | 2000-01-11 | Philip Morris Incorporated | Process control by transient thermography |
| US6172512B1 (en) * | 1998-02-19 | 2001-01-09 | International Business Machines Corporation | Image processing methods for the optical detection of dynamic errors in integrated circuits |
| US7083327B1 (en) * | 1999-04-06 | 2006-08-01 | Thermal Wave Imaging, Inc. | Method and apparatus for detecting kissing unbond defects |
| US6394646B1 (en) | 1999-04-16 | 2002-05-28 | General Electric Company | Method and apparatus for quantitative nondestructive evaluation of metal airfoils using high resolution transient thermography |
| US6367968B1 (en) | 1999-07-21 | 2002-04-09 | General Electric Company | Thermal resonance imaging method |
| US6367969B1 (en) | 1999-07-21 | 2002-04-09 | General Electric Company | Synthetic reference thermal imaging method |
| TW501290B (en) * | 1999-07-23 | 2002-09-01 | Telcordia Tech Inc | Infrared thermographic method for process monitoring and control of multilayer conductive compositions |
| JP3976953B2 (ja) | 1999-08-13 | 2007-09-19 | 森永乳業株式会社 | 容器入り流動物の流動性の判別方法及びその装置 |
| US6595684B1 (en) | 1999-11-03 | 2003-07-22 | Northrop Grumman Corporation | System and method for evaluating a structure |
| US7724925B2 (en) * | 1999-12-02 | 2010-05-25 | Thermal Wave Imaging, Inc. | System for generating thermographic images using thermographic signal reconstruction |
| DE60041661D1 (de) * | 1999-12-02 | 2009-04-09 | Thermal Wave Imaging Inc | Verfahren und system zur bezugsfreien thermographischen erkennung von suboberflächendefekten unter verwendung komprimierter bilddaten |
| US6751342B2 (en) | 1999-12-02 | 2004-06-15 | Thermal Wave Imaging, Inc. | System for generating thermographic images using thermographic signal reconstruction |
| US6260998B1 (en) * | 2000-01-19 | 2001-07-17 | Visteon Global Technologies, Inc. | Method for specifying accelerated thermal cycling tests for electronic solder joint durability |
| US7401976B1 (en) * | 2000-08-25 | 2008-07-22 | Art Advanced Research Technologies Inc. | Detection of defects by thermographic analysis |
| WO2002089042A1 (en) * | 2001-04-13 | 2002-11-07 | Thermal Wave Imaging, Inc. | System for generating thermographic images using thermographic signal reconstruction |
| US6840666B2 (en) * | 2002-01-23 | 2005-01-11 | Marena Systems Corporation | Methods and systems employing infrared thermography for defect detection and analysis |
| JP2003215081A (ja) * | 2002-01-24 | 2003-07-30 | Central Glass Co Ltd | 板ガラスに形成された導電線の断線検査方法およびその装置 |
| US7425093B2 (en) * | 2003-07-16 | 2008-09-16 | Cabot Corporation | Thermography test method and apparatus for bonding evaluation in sputtering targets |
| US7129492B2 (en) * | 2003-07-29 | 2006-10-31 | Toyota Motor Manufacturing North America, Inc. | Systems and methods for inspecting coatings |
| ITRM20030524A1 (it) * | 2003-11-12 | 2005-05-13 | Ct Sviluppo Materiali Spa | Apparato e metodo per il controllo della qualita' |
| US7474115B1 (en) | 2004-12-28 | 2009-01-06 | Dupont Displays, Inc. | Organic electronic device display defect detection |
| US7409313B2 (en) * | 2005-12-16 | 2008-08-05 | General Electric Company | Method and apparatus for nondestructive evaluation of insulative coating |
| JP4908995B2 (ja) | 2006-09-27 | 2012-04-04 | 株式会社日立ハイテクノロジーズ | 欠陥分類方法及びその装置並びに欠陥検査装置 |
| WO2010106639A1 (ja) * | 2009-03-17 | 2010-09-23 | 西日本高速道路エンジニアリング四国株式会社 | 構造物の損傷深さ判定方法とその装置及び構造物の損傷処置判定方法とその装置 |
| US8204294B2 (en) * | 2009-11-25 | 2012-06-19 | Toyota Motor Engineering & Manufacturing North America, Inc. | Systems and methods for detecting defects in coatings utilizing color-based thermal mismatch |
| ES2446546T3 (es) * | 2009-12-10 | 2014-03-10 | Emhart Glass S.A. | Método y sistema para la monitorización de un proceso de formación de recipientes de vidrio |
| US9671357B2 (en) * | 2009-12-10 | 2017-06-06 | Emhardt Glass S.A. | System and method for monitoring hot glass containers to enhance their quality and control the forming process |
| DE102010027072A1 (de) * | 2010-07-13 | 2012-01-19 | Prüftechnik Dieter Busch AG | Verfahren und System zur Vorhersage von Fehlern an Komponenten rotierender Maschinen mit Thermographie |
| DE102010063149A1 (de) * | 2010-12-15 | 2012-06-21 | Siemens Aktiengesellschaft | Testen von Baugruppen |
| JP5764592B2 (ja) * | 2013-02-22 | 2015-08-19 | 東京エレクトロン株式会社 | 基板処理装置、基板処理装置の監視装置及び基板処理装置の監視方法 |
| WO2015035445A1 (en) * | 2013-09-10 | 2015-03-19 | Metso Minerals (Australia) Limited | Infrared detection of conveyor belt faults |
| US20160212360A1 (en) * | 2015-01-21 | 2016-07-21 | Siemens Energy, Inc. | In-situ inspection of power generating machinery |
| KR101840837B1 (ko) * | 2017-12-06 | 2018-03-21 | 엘아이지넥스원 주식회사 | 적외선 검출기의 온도에 따른 불량화소 검출장치 및 방법 |
| KR102670136B1 (ko) * | 2019-04-08 | 2024-05-29 | 한국전력공사 | 변압기 소음 제거 장치 및 방법 |
| CN111862019B (zh) * | 2020-07-11 | 2023-04-11 | 北京唯实兴邦科技有限公司 | 一种热电光软多维信息融合电路智能检测与故障诊断方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4061578A (en) * | 1976-04-05 | 1977-12-06 | Marcos Kleinerman | Infrared detection and imaging, method and apparatus |
| DE2704871C3 (de) * | 1977-02-05 | 1981-03-26 | Bodenseewerk Perkin-Elmer & Co GmbH, 88662 Überlingen | Verfahren zu Differenzthermoanalyse |
| SE8300166L (sv) * | 1982-01-18 | 1983-07-19 | Uti Instruments Co | Digital bildbehandling |
| US4558222A (en) * | 1982-11-06 | 1985-12-10 | Barr & Stroud Limited | Infrared radiation detecting systems |
| US4513441A (en) * | 1983-08-02 | 1985-04-23 | Sparta, Inc. | Image comparison system |
| CA1229392A (en) * | 1984-02-28 | 1987-11-17 | Hirosato Yamane | Method and apparatus for detection of surface defects of hot metal body |
| US4816681A (en) * | 1984-10-02 | 1989-03-28 | Fuji Photo Film Co., Ltd. | Method and apparatus for improving quality of energy subtraction image |
| US4759073A (en) * | 1985-11-15 | 1988-07-19 | Kulicke & Soffa Industries, Inc. | Bonding apparatus with means and method for automatic calibration using pattern recognition |
| US4872052A (en) * | 1986-12-03 | 1989-10-03 | View Engineering, Inc. | Semiconductor device inspection system |
| US4755874A (en) * | 1987-08-31 | 1988-07-05 | Kla Instruments Corporation | Emission microscopy system |
| FR2641870B1 (fr) * | 1989-01-19 | 1991-07-12 | Bull Sa | Procede pour le controle d'une carte de circuit imprime equipee, notamment le controle des soudures de la carte, et appareillage pour la mise en oeuvre de ce procede |
| US5032727A (en) * | 1990-09-14 | 1991-07-16 | Digital Equipment Corporation | Product defect detection using thermal ratio analysis |
-
1990
- 1990-09-14 US US07/582,102 patent/US5032727A/en not_active Expired - Lifetime
-
1991
- 1991-06-05 AU AU78189/91A patent/AU626146B2/en not_active Ceased
- 1991-07-19 CA CA002047426A patent/CA2047426A1/en not_active Abandoned
- 1991-07-30 EP EP91306974A patent/EP0475570A2/en not_active Withdrawn
- 1991-08-01 JP JP3192930A patent/JPH04282445A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009109511A (ja) * | 2001-05-21 | 2009-05-21 | Pressco Technology Inc | 自動化されたプロセス制御物品検査アプリケーションの中でスナップショット動作熱赤外線イメージングを提供するための装置および方法 |
| US8097857B2 (en) | 2001-05-21 | 2012-01-17 | Pressco Technology Inc. | Apparatus and method for providing snapshot action thermal infrared imaging within automated process control article inspection applications |
| JP2015534060A (ja) * | 2012-09-19 | 2015-11-26 | センサス スペクトラム エルエルシー | 電気メータの故障を予防する方法および装置 |
| JP2015529336A (ja) * | 2012-09-21 | 2015-10-05 | 杭州美盛紅外光電技術有限公司 | 熱画像診断装置および熱画像診断方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US5032727A (en) | 1991-07-16 |
| CA2047426A1 (en) | 1992-03-15 |
| AU7818991A (en) | 1992-03-19 |
| EP0475570A3 (enExample) | 1994-02-09 |
| EP0475570A2 (en) | 1992-03-18 |
| AU626146B2 (en) | 1992-07-23 |
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