JPH0424252U - - Google Patents

Info

Publication number
JPH0424252U
JPH0424252U JP6574490U JP6574490U JPH0424252U JP H0424252 U JPH0424252 U JP H0424252U JP 6574490 U JP6574490 U JP 6574490U JP 6574490 U JP6574490 U JP 6574490U JP H0424252 U JPH0424252 U JP H0424252U
Authority
JP
Japan
Prior art keywords
electron microscope
objective aperture
optical axis
tilted
image observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6574490U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6574490U priority Critical patent/JPH0424252U/ja
Publication of JPH0424252U publication Critical patent/JPH0424252U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の実施例に係る電子顕微鏡の光
学系の概要と構成を示す図、第２図は従来の電子
顕微鏡によりＸ線エネルギ分析と像の観察を同時
に行う場合の電子顕微鏡の光学系の概要と構成を
示す図、第３図は第２図の場合に対物絞りを使用
しない場合の構成図である。 １……電子顕微鏡、２……光軸、３……試料、
４……Ｘ線、５……電子線、６……Ｘ線分光器、
８……像、１１……対物絞り。

Claims (1)

    【実用新案登録請求の範囲】
  1. 像の観察とＸ線エネルギ分析とを同時に行う電
    子顕微鏡において、電子線の対物絞りを、光軸に
    対して傾斜させたことを特徴とする電子顕微鏡の
    対物絞り装置。
JP6574490U 1990-06-21 1990-06-21 Pending JPH0424252U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6574490U JPH0424252U (ja) 1990-06-21 1990-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6574490U JPH0424252U (ja) 1990-06-21 1990-06-21

Publications (1)

Publication Number Publication Date
JPH0424252U true JPH0424252U (ja) 1992-02-27

Family

ID=31597845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6574490U Pending JPH0424252U (ja) 1990-06-21 1990-06-21

Country Status (1)

Country Link
JP (1) JPH0424252U (ja)

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