JPH0374460U - - Google Patents
Info
- Publication number
- JPH0374460U JPH0374460U JP13489589U JP13489589U JPH0374460U JP H0374460 U JPH0374460 U JP H0374460U JP 13489589 U JP13489589 U JP 13489589U JP 13489589 U JP13489589 U JP 13489589U JP H0374460 U JPH0374460 U JP H0374460U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron microscope
- scanning electron
- vent hole
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
Description
第１図は本案の試料台の説明図、第２図は本案
の実施例を示す図である。 １……電子線、２……試料、３……接着剤、４
……ガス抜き穴、５……放出ガスの排気経路、６
……試料台、７……試料ホールダ。
の実施例を示す図である。 １……電子線、２……試料、３……接着剤、４
……ガス抜き穴、５……放出ガスの排気経路、６
……試料台、７……試料ホールダ。
Claims (1)
- 走査電子顕微鏡の観察において、試料の固定用
として使用される接着剤及び試料自身から放出さ
れるガスの早期排気除去を目的としてガス抜き穴
を設けたことを特徴とする走査形電子顕微鏡用試
料台。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13489589U JPH0374460U (ja) | 1989-11-22 | 1989-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13489589U JPH0374460U (ja) | 1989-11-22 | 1989-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374460U true JPH0374460U (ja) | 1991-07-26 |
Family
ID=31682198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13489589U Pending JPH0374460U (ja) | 1989-11-22 | 1989-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374460U (ja) |
-
1989
- 1989-11-22 JP JP13489589U patent/JPH0374460U/ja active Pending
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