JPS6177543U - - Google Patents

Info

Publication number
JPS6177543U
JPS6177543U JP16236984U JP16236984U JPS6177543U JP S6177543 U JPS6177543 U JP S6177543U JP 16236984 U JP16236984 U JP 16236984U JP 16236984 U JP16236984 U JP 16236984U JP S6177543 U JPS6177543 U JP S6177543U
Authority
JP
Japan
Prior art keywords
sample
semiconductor wafer
configuring
exclusively
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16236984U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16236984U priority Critical patent/JPS6177543U/ja
Publication of JPS6177543U publication Critical patent/JPS6177543U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本案の動作原理を示す対物レンズ周り
の概略図、第２図はそれの部分的詳細図である。 １…対物レンズ、２…対物レンズ下部磁極、３
…半導体ウエハ試料、６，７…板。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハ試料を専ら検鏡する走査電子顕微
    鏡において、最終段レンズの試料側に差動排気構
    造を構成する事によつて該試料を大気中に設置す
    る事を特徴とする走査電子顕微鏡。
JP16236984U 1984-10-29 1984-10-29 Pending JPS6177543U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16236984U JPS6177543U (ja) 1984-10-29 1984-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16236984U JPS6177543U (ja) 1984-10-29 1984-10-29

Publications (1)

Publication Number Publication Date
JPS6177543U true JPS6177543U (ja) 1986-05-24

Family

ID=30720255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16236984U Pending JPS6177543U (ja) 1984-10-29 1984-10-29

Country Status (1)

Country Link
JP (1) JPS6177543U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003209149A (ja) * 2001-11-02 2003-07-25 Ebara Corp 検査装置を内蔵する半導体製造装置および該製造装置を用いるデバイス製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003209149A (ja) * 2001-11-02 2003-07-25 Ebara Corp 検査装置を内蔵する半導体製造装置および該製造装置を用いるデバイス製造方法

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