JPS6387759U - - Google Patents

Info

Publication number
JPS6387759U
JPS6387759U JP18180886U JP18180886U JPS6387759U JP S6387759 U JPS6387759 U JP S6387759U JP 18180886 U JP18180886 U JP 18180886U JP 18180886 U JP18180886 U JP 18180886U JP S6387759 U JPS6387759 U JP S6387759U
Authority
JP
Japan
Prior art keywords
astigmatism correction
coil
electron microscope
scanning electron
deflection coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18180886U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18180886U priority Critical patent/JPS6387759U/ja
Publication of JPS6387759U publication Critical patent/JPS6387759U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本案の一実施例の断面図である。 ３，４…偏向コイル、７…非点収差補正コイル
、９，１０…マイクロメータヘツド。

Claims (1)

    【実用新案登録請求の範囲】
  1. 偏向コイルと非点収差補正コイルを有する走査
    電子顕微鏡において、前記偏向コイルに対し、前
    記非点収差補正コイルを移動するための手段を設
    けたことを特徴とする走査電子顕微鏡の非点収差
    補正装置。
JP18180886U 1986-11-28 1986-11-28 Pending JPS6387759U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18180886U JPS6387759U (ja) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18180886U JPS6387759U (ja) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6387759U true JPS6387759U (ja) 1988-06-08

Family

ID=31127018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18180886U Pending JPS6387759U (ja) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6387759U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019204694A (ja) * 2018-05-24 2019-11-28 株式会社ニューフレアテクノロジー マルチ電子ビーム画像取得装置及びマルチ電子ビーム光学系の位置決め方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019204694A (ja) * 2018-05-24 2019-11-28 株式会社ニューフレアテクノロジー マルチ電子ビーム画像取得装置及びマルチ電子ビーム光学系の位置決め方法

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