JPS6296256U - - Google Patents

Info

Publication number
JPS6296256U
JPS6296256U JP18718885U JP18718885U JPS6296256U JP S6296256 U JPS6296256 U JP S6296256U JP 18718885 U JP18718885 U JP 18718885U JP 18718885 U JP18718885 U JP 18718885U JP S6296256 U JPS6296256 U JP S6296256U
Authority
JP
Japan
Prior art keywords
fine movement
objective lens
utility
pressed against
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18718885U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18718885U priority Critical patent/JPS6296256U/ja
Publication of JPS6296256U publication Critical patent/JPS6296256U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す断面図である
。 １…電子ビーム、２…対物レンズ、３…試料、
４…試料台、５…微動台（Ｘ，Ｙ）、６…微動台
（Ｚ）、７…微動台（Ｔ）、８…微動台（Ｒ）、
９…固定部、１０…アテイタ、１１…ボス、１２
…ピニオン、１３…ラツク。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ 観察像の視野を選択移動させる走査形電子顕
    微鏡の試料微動装置において、微動台を対物レン
    ズに圧着できる構造を有することを特徴とする試
    料微動装置。 ２ 実用新案登録請求の範囲第１項において、微
    動台は真空外より、対物レンズに圧着できる構造
    を有することを特徴とする試料微動装置。
JP18718885U 1985-12-06 1985-12-06 Pending JPS6296256U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18718885U JPS6296256U (ja) 1985-12-06 1985-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18718885U JPS6296256U (ja) 1985-12-06 1985-12-06

Publications (1)

Publication Number Publication Date
JPS6296256U true JPS6296256U (ja) 1987-06-19

Family

ID=31137434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18718885U Pending JPS6296256U (ja) 1985-12-06 1985-12-06

Country Status (1)

Country Link
JP (1) JPS6296256U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01216204A (ja) * 1988-02-25 1989-08-30 Jeol Ltd 走査トンネル顕微鏡

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01216204A (ja) * 1988-02-25 1989-08-30 Jeol Ltd 走査トンネル顕微鏡

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